L
L. Csepregi
Publications - 5
Citations - 2237
L. Csepregi is an academic researcher. The author has contributed to research in topics: Silicon & Etching (microfabrication). The author has an hindex of 5, co-authored 5 publications receiving 2195 citations.
Papers
More filters
Journal ArticleDOI
Anisotropic Etching of Crystalline Silicon in Alkaline Solutions I . Orientation Dependence and Behavior of Passivation Layers
TL;DR: In this article, the anisotropic etching behavior of single-crystal silicon and the behavior of and in an ethylenediamine-based solution as well as in aqueous,, and were studied.
Journal ArticleDOI
Anisotropic Etching of Crystalline Silicon in Alkaline Solutions II . Influence of Dopants
TL;DR: In this article, the etching behavior of highly boron doped silicon in aqueous solutions based of ethylenediamine, KOH, NaOH, and LiOH was studied.
Journal ArticleDOI
X‐Ray Investigation of Boron‐ and Germanium‐Doped Silicon Epitaxial Layers
TL;DR: In this article, the lattice strain in highly boron-doped, highly germanium−doped epitaxial layers was investigated by means of x-ray techniques.
Journal ArticleDOI
Design optimization for cantilever-type accelerometers
Helmut Seidel,L. Csepregi +1 more
TL;DR: In this paper, a procedure for the optimization of cantilever-type piezoresistive and capacitive accelerometer structures with respect to high sensitivity for a given bandwidth, or to large bandwidth when the sensitivity is given, is presented.
Journal ArticleDOI
Three-dimensional structuring of silicon for sensor applications
Helmut Seidel,L. Csepregi +1 more
TL;DR: In this paper, data on the crystal orientation dependence, the dependence on boron dopant concentration and the temperature behaviour of the etch rate for KOH-based and ethylenediamine-based solutions are presented and compared, providing assistance in selecting the appropriate etchant for a specific application.