Recent interest in high-speed scanning probe microscopy for high-throughput applications including video-rate atomic force microscopy and probe-based nanofabrication has sparked attention on the development of high-bandwidth flexure-guided nanopositioning systems (nanopositioners). Such nanopositioners are designed to move samples with sub-nanometer resolution with positioning bandwidth in the kilohertz range. State-of-the-art designs incorporate uniquely designed flexure mechanisms driven by compact and stiff piezoelectric actuators. This paper surveys key advances in mechanical design and control of dynamic effects and nonlinearities, in the context of high-speed nanopositioning. Future challenges and research topics are also discussed.

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Invited review article: high-speed flexure-guided nanopositioning: mechanical design and control issues.

This paper presents an exercise in comparing the performance of microelectromechanical systems (MEMS) actuators and sensors as a function of operating principle. Data have been obtained from the literature for the mechanical performance characteristics of actuators, force sensors and displacement sensors. On-chip and off-chip actuators and sensors are each sub-grouped into families, classes and members according to their principle of operation. The performance of MEMS sharing common operating principles is compared with each other and with equivalent macroscopic devices. The data are used to construct performance maps showing the capability of existing actuators and sensors in terms of maximum force and displacement capability, resolution and frequency. These can also be used as a preliminary design tool, as shown in a case study on the design of an on-chip tensile test machine for materials in thin-film form.

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MEMS actuators and sensors: observations on their performance and selection for purpose

This paper describes electrothermal microactuators that generate rectilinear displacements and forces by leveraging deformations caused by localized thermal stresses. In one manifestation, an electric current is passed through a V-shaped beam anchored at both ends, and thermal expansion caused by joule heating pushes the apex outward. Analytical and finite element models of device performance are presented along with measured results of devices fabricated using electroplated Ni and p/sup ++/ Si as structural materials. A maskless process extension for incorporating thermal and electrical isolation is described. Nickel devices with 410-/spl mu/m-long, 6-/spl mu/m-wide, and 3-/spl mu/m-thick beams demonstrate 10 /spl mu/m static displacements at 79 mW input power; silicon devices with 800-/spl mu/m-long, 13.9-/spl mu/m-wide, and 3.7-/spl mu/m-thick beams demonstrate 5 /spl mu/m displacement at 180 mW input power. Cascaded silicon devices using three beams of similar dimensions offer comparable displacement with 50-60% savings in power consumption. The peak output forces generated are estimated to be in the range from 1 to 10 mN for the single beam devices and from 0.1 to 1 mN for the cascaded devices. Measured bandwidths are /spl ap/700 Hz for both. The typical drive voltages used are /spl les/12 V, permitting the use of standard electronic interfaces that are generally inadequate for electrostatic actuators.

Bent-beam electrothermal actuators-Part I: Single beam and cascaded devices

Position sensors with nanometer resolution are a key component of many precision imaging and fabrication machines. Since the sensor characteristics can define the linearity, resolution and speed of the machine, the sensor performance is a foremost consideration. The first goal of this article is to define concise performance metrics and to provide exact and approximate expressions for error sources including non-linearity, drift and noise. The second goal is to review current position sensor technologies and to compare their performance. The sensors considered include: resistive, piezoelectric and piezoresistive strain sensors; capacitive sensors; electrothermal sensors; eddy current sensors; linear variable displacement transformers; interferometers; and linear encoders.

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A review of nanometer resolution position sensors: Operation and performance

This paper presents materials and designs for an ultrathin, stretchable class of device that is capable of lamination onto the surface of the skin, for wireless determination of dielectric and surface strain properties. The sensor exploits LC resonators with capacitive electrodes whose radio frequency characteristics change with variations in skin properties, and is capable of conformal and spontaneous integration with skin due to their skin-like, “epidermal”, mechanical properties. Resonance frequencies of the LC resonators can be measured wirelessly through changes in the absorption of electromagnetic energy from a coil connected to an impedance measurement setup and placed in proximity to the epidermal device. Experimental results demonstrate that the device offers a precision of 1.1 (arbitrary unit of a reference commercial hydration meter) for hydration and 1.3% for strain detection, with good stability and low drift. Measurement of simulated lymphedema using an expandable balloon with an attached sensor further demonstrates the potential for using such a sensor in monitoring skin swelling. Finite element simulation of physical deformation and associated changes in electrical properties enable quantitative interpretation of the experimental results. The results may have relevance for wireless evaluation of the skin, for applications ranging from dermatology and cosmetology to health/wellness monitoring (lymphedema, transdermal water loss, edema, and psychological stress).

Materials and Designs for Wireless Epidermal Sensors of Hydration and Strain

For Part I see L. Que, J.S. Park and Y.B. Gianchandani, ibid., vol.10, pp.247-54 (2001). This paper reports on the use of bent-beam electrothermal actuators for the purpose of generating rotary and long-throw rectilinear displacements. The rotary displacements are achieved by orthogonally arranged pairs of cascaded actuators that are used to rotate a gear. Devices were fabricated using electroplated Ni, p/sup ++/ Si, and polysilicon as structural materials. Displacements of 20-30 /spl mu/m with loading forces >150 /spl mu/N at actuation voltages 200 /spl mu/N at displacements >100 /spl mu/m were measured.

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Bent-beam electrothermal actuators-Part II: Linear and rotary microengines

This paper reports on a multi-purpose two-axis micropositioner with sub-nanometer position sensing for precise feedback control. Along each axis it has an electrothermal actuator, a capacitive position sensor and a displacement amplifier that provides a gain of 3.37 for the sensor. It is fabricated from custom SOI wafers using dry etching, and each component is electrically and thermally isolated by silicon nitride. For a fabricated device of 65 µ mt hickness, the measured displacement sensitivity is 0.333 fF nm −1 ,w hich corresponds to 0.3 nm resolution with available laboratory instrumentation. The range is ≈19 µ ma long each axis for the positioner, which corresponds to 66 µ mt ravel in the sense combs. Using an external parallel inductor, a positioning displacement of 9.6 µ mo ffers as hift of 240 kHz in L–C resonance, corresponding to a sensitivity of 25 Hz nm −1 . (Some figures in this article are in colour only in the electronic version)

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A micromachined 2D positioner with electrothermal actuation and sub-nanometer capacitive sensing

This paper describes a laterally deflecting micromachined device that offers high sensitivity and wide dynamic range to electronically monitor the thermal expansion coefficient, tensile and compressive residual strain and Young's modulus of microstructural materials, as well as the temperature dependence of these properties. The device uses sidewall capacitance between interdigitated tines to sense displacement caused by the release of residual stress in a bent-beam suspension. Electrostatic force is used to obtain load-deflection profiles. The suspensions and tines are arranged such that output is a differential readout, immune to common mode parasitic capacitance. Analytical and numerical modeling results are presented and the device concept is verified by three different fabrication approaches using polysilicon and nickel as structural materials. Measured values of residual strain, thermal expansion and Young's modulus are very consistent with measurements taken by other approaches and those reported previously. For example, the residual strain in certain electrodeposited Ni structures was tracked from 68.5 microstrain at 23/spl deg/C to -420 microstrain at 130/spl deg/C, providing an expansion coefficient of 8.2 ppm/K; the best fit Young's modulus provided by the device was 115 GPa.

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Measurements of material properties using differential capacitive strain sensors

This paper reports on significant advances in electrothermal bent beam actuators. Designs for long throw linear and rotary actuators are described. Silicon p++ devices showed 20--30 {mu}m displacements with 150 {micro}N loads at actuation levels of 6--8 V, and 250--300 mW. An electroplated version provided 15 {mu}m displacements at 0.8 V and 450 mW. Inchworm type devices are reported that had linear displacements of 100 {micro}m with 200 {micro}N loads. Refinements in the modeling to account for non-linear thermal expansion coefficients and buckling are also reported.

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Long throw and rotary output electro-thermal actuators based on bent-beam suspensions

This paper reports on several aspects of the performance and application of bent-beam microactuators. Orthogonal pairs of p/sup +/ Si cascaded actuators with 500-1000 /spl mu/m long, 6.5 /spl mu/m thick beams designed for rotary drives are shown to produce 20-30 /spl mu/m non-resonant displacement with >150 /spl mu/N loading at less than 8 V, 300 mW. Inchworm type devices using 500-1500 /spl mu/m long, 8-14 /spl mu/m thick bent-beams are shown to produce up to 104 /spl mu/m displacement against 204 /spl mu/N loading farce with 250-750 mW DC and pulse actuation. Integrated passive locks reduce standby power to zero. Measured frequency response of bent-beam actuators and refinements in modeling that include non-linear thermal expansion coefficients and buckling are also reported.

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L.L. Chu

Papers

Bent-beam electrothermal actuators-Part II: Linear and rotary microengines

A micromachined 2D positioner with electrothermal actuation and sub-nanometer capacitive sensing

Measurements of material properties using differential capacitive strain sensors

Long throw and rotary output electro-thermal actuators based on bent-beam suspensions

Long throw and rotary output electro-thermal actuators based on bent-beam suspensions