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Lynford L. Goddard

Researcher at University of Illinois at Urbana–Champaign

Publications -  209
Citations -  3655

Lynford L. Goddard is an academic researcher from University of Illinois at Urbana–Champaign. The author has contributed to research in topics: Laser & Semiconductor laser theory. The author has an hindex of 30, co-authored 202 publications receiving 3174 citations. Previous affiliations of Lynford L. Goddard include Stanford University & Lawrence Livermore National Laboratory.

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Proceedings ArticleDOI

Fabrication of Diffractive Optical Elements with Digital Projection Photochemical Etching

TL;DR: In this paper, the authors demonstrate a new fabrication technique called digital projection photochemical etching and apply it to make complicated gray-scale diffractive optical elements, such as a radial sinusoidal grating, in a single processing step.
Proceedings ArticleDOI

White-light interferometric microscopy for wafer defect inspection

TL;DR: In this paper, a white-light epi-illumination diffraction phase microscopy (epi-wDPM) was used for defect detection in a 9 nm densely patterned wafer with bright-field imaging.
Proceedings ArticleDOI

Mode suppression in metal filled photonic crystal vertical cavity lasers

TL;DR: In this article, the simulation results for an etched air hole photonic crystal (PhC) vertical cavity surface emitting laser (VCSEL) structure with various thicknesses of metal deposited inside the holes are presented.
Proceedings ArticleDOI

A computational study of a hybrid plasmonic-microring for label-free detection

TL;DR: In this paper, the geometrical parameters of a hybrid plasmonic-microring resonator were investigated to enhance the detection sensitivity of the sensor without compromising the device performance.
Proceedings ArticleDOI

Spatial light interference microscopy with programmable illumination patterns

TL;DR: In this article, a commercial projector is used as a programmable illumination source for spatial light interference microscopy, providing flexibility and optimization of illumination pattern for images with higher resolution and less optical artifacts.