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Chris Edwards

Researcher at University of Illinois at Urbana–Champaign

Publications -  45
Citations -  1201

Chris Edwards is an academic researcher from University of Illinois at Urbana–Champaign. The author has contributed to research in topics: Laser & Coherence (physics). The author has an hindex of 13, co-authored 45 publications receiving 1023 citations.

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Diffraction phase microscopy: principles and applications in materials and life sciences

TL;DR: In this article, the authors present a diffraction phase microscopy (DPM) system, which is a common-path quantitative phase imaging (QPI) method that significantly alleviates the noise problem.
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Optically monitoring and controlling nanoscale topography during semiconductor etching

TL;DR: In this article, a non-destructive optical imaging technique that combines a conventional microscope with a compact Mach-Zehnder interferometer is used to measure etch rates at each location across the sample with resolution of 0.085 nm s−1 per pixel.
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Detecting 20 nm wide defects in large area nanopatterns using optical interferometric microscopy.

TL;DR: This work reports on a nondestructive low-noise interferometric imaging method capable of detecting nanoscale defects within a wide field of view using visible light, which enables successful detection of several different types of sparse defects.
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Effects of spatial coherence in diffraction phase microscopy

TL;DR: This work shows that white light diffraction phase microscopy using a standard halogen lamp can produce accurate height maps of even the most challenging structures provided that there is proper spatial filtering at: 1) the condenser to ensure adequate spatial coherence and 2) the output Fourier plane to produce a uniform reference beam.