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Lynford L. Goddard

Researcher at University of Illinois at Urbana–Champaign

Publications -  209
Citations -  3655

Lynford L. Goddard is an academic researcher from University of Illinois at Urbana–Champaign. The author has contributed to research in topics: Laser & Semiconductor laser theory. The author has an hindex of 30, co-authored 202 publications receiving 3174 citations. Previous affiliations of Lynford L. Goddard include Stanford University & Lawrence Livermore National Laboratory.

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Electromagnetic field modeling for defect detection in 7 nm node patterned wafers

TL;DR: In this article, the vector boundary element method is firstly introduced to calculate the scattering field of a patterned wafer at a specific objective plane, after which a vector imaging theory is introduced to compute the field at an image plane for an imaging system with a high numerical aperture objective lens.
Proceedings ArticleDOI

Modeling of compact Pd coated VCSELs for hydrogen sensing

TL;DR: In this paper, the authors report on designs for compact VCSEL sensors for use in hydrogen gas detection, which can be positioned into a 2D array with varying mesa diameters and palladium thickness in order to distinguish and track the specific level of hydrogen present in the atmosphere.
Proceedings ArticleDOI

Parallel FETI-DP algorithm for defect detection in large-area nanopatterned wafers

TL;DR: An efficient parallelization of the dual-primal finite-element tearing and interconnecting algorithm (FETI-DP) is presented for detecting defects in large-area nanopatterned wafers and a preconditioner is developed to improve the iterative convergence of the coarse problem.