L
Lynford L. Goddard
Researcher at University of Illinois at Urbana–Champaign
Publications - 209
Citations - 3655
Lynford L. Goddard is an academic researcher from University of Illinois at Urbana–Champaign. The author has contributed to research in topics: Laser & Semiconductor laser theory. The author has an hindex of 30, co-authored 202 publications receiving 3174 citations. Previous affiliations of Lynford L. Goddard include Stanford University & Lawrence Livermore National Laboratory.
Papers
More filters
Journal ArticleDOI
Realization of palladium-based optomechanical cantilever hydrogen sensor.
TL;DR: The experimental realization of a palladium thin film cantilever optomechanical hydrogen gas sensor is presented and it is observed that the sensor’s minimum detection limit was well below the 250 p.p.m. limit of the test equipment.
Proceedings ArticleDOI
9nm node wafer defect inspection using three-dimensional scanning, a 405nm diode laser, and a broadband source
TL;DR: In this paper, a 405nm laser based optical interferometry system for 9nm node patterned wafer defect inspection has been built, where defects with volumes smaller than 15nm by 90nm by 35nm have been detected.
Journal ArticleDOI
Efficient and wideband acousto-optic modulation on thin-film lithium niobate for microwave-to-photonic conversion
TL;DR: In this article, a microwave signal is first piezoelectrically transduced using interdigitated electrodes into Lamb acoustic waves, which directly propagates across an optical waveguide and causes refractive index perturbation through the photoelastic effect.
Proceedings ArticleDOI
9nm node wafer defect inspection using visible light
TL;DR: Wang et al. as discussed by the authors developed a common opticalpath, 532 nm laser epi-illumination diffraction phase microscope (epi-DPM) and successfully applied it to detect different types of defects down to 20 by 100 nm in a 22nm node intentional defect array (IDA) wafer.
Journal ArticleDOI
Enhanced Environmental Scanning Electron Microscopy Using Phase Reconstruction and Its Application in Condensation.
Lenan Zhang,Jinlong Zhu,Kyle L. Wilke,Z.Y. Xu,Lin Zhao,Zhengmao Lu,Lynford L. Goddard,Evelyn N. Wang +7 more
TL;DR: This work provides a simple approach for high-performance ESEM imaging at high-pressure conditions without changes to the hardware and can be widely applied to investigate a broad range of static and dynamic processes.