M
M. Curtin
Publications - 19
Citations - 483
M. Curtin is an academic researcher. The author has contributed to research in topics: Silicon & Polymer solar cell. The author has an hindex of 9, co-authored 19 publications receiving 465 citations.
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Journal ArticleDOI
Defect reduction of selective Ge epitaxy in trenches on Si(001) substrates using aspect ratio trapping
TL;DR: In this article, a defect-free germanium was demonstrated in SiO2 trenches on silicon via aspect ratio trapping, whereby defects arising from lattice mismatch are trapped by laterally confining sidewalls.
Journal ArticleDOI
Growth of Ge Thick Layers on Si(001) Substrates Using Reduced Pressure Chemical Vapor Deposition
TL;DR: Growth of Ge thick layers with and without a low temperature Ge buffer has been investigated using reduced pressure chemical vapor deposition with emphasis on the evolution of surface morphology and its roughness as mentioned in this paper.
Journal ArticleDOI
Low-Defect-Density Ge Epitaxy on Si(001) Using Aspect Ratio Trapping and Epitaxial Lateral Overgrowth
Ji-Soo Park,M. Curtin,J. M. Hydrick,J. Bai,J. Li,Z. Y. Cheng,M. Carroll,J. G. Fiorenza,Anthony Lochtefeld +8 more
TL;DR: In this article, a low-defect-density Ge epitaxy was fabricated using aspect ratio trapping combined with epitaxial lateral overgrowth techniques, and then Ge was laterally grown to form 20 μm wide, 6 mm long strips.
Journal ArticleDOI
Chemical Mechanical Polishing of Epitaxial Germanium on SiO2-patterned Si(001) Substrates
Jennifer Hydrick,Ji-Soo Park,Jie Bai,Cheryl Major,M. Curtin,James Fiorenza,M. Carroll,Anthony Lochtefeld +7 more
Journal ArticleDOI
Defect Reduction and Its Mechanism of Selective Ge Epitaxy in Trenches on Si(001) Substrates using Aspect Ratio Trapping
Ji-Soo Park,Jie Bai,M. Curtin,B. Adekore,Z. Y. Cheng,M. Carroll,Michael Dudley,Anthony Lochtefeld +7 more
TL;DR: In this paper, defect-free germanium has been demonstrated in SiO2 trenches on silicon via aspect ratio trapping, whereby defects arising from lattice mismatch are trapped by laterally confining sidewalls.