scispace - formally typeset
M

Manfred Beckers

Researcher at Linköping University

Publications -  36
Citations -  1752

Manfred Beckers is an academic researcher from Linköping University. The author has contributed to research in topics: Thin film & Sputter deposition. The author has an hindex of 18, co-authored 36 publications receiving 1549 citations.

Papers
More filters
Journal ArticleDOI

The Mn+1AXn phases: Materials science and thin-film processing

TL;DR: A critical review of the M(n + 1)AX(n) phases from a materials science perspective is given in this article, where the authors discuss the potential for low-temperature synthesis, which is essential for deposition of MAX phases onto technologically important substrates.
Journal ArticleDOI

Sputter deposition from a Ti2AlC target: Process characterization and conditions for growth of Ti2AlC

TL;DR: Sputter deposition from a Ti2AlC target was found to yield Ti-Al-C films with a composition that deviated from the target composition of 2:1:1 as mentioned in this paper.
Journal ArticleDOI

Bonding mechanism in the nitrides Ti2AlN and TiN: An experimental and theoretical investigation

TL;DR: In this article, the electronic structure of nanolaminate Ti2AlN and TiN thin films has been investigated by bulk-sensitive soft x-ray emission spectroscopy.
Journal ArticleDOI

Effects of strain and composition on the lattice parameters and applicability of Vegard"s rule in Al-rich Al1-xInxN films grown on sapphire

TL;DR: In this paper, the lattice parameters and strain evolution in Al1−xInxN films with 0.07⩽x ⩽0.22 grown on GaN-buffered sapphire substrates by metal organic vapor phase epitaxy have been studied by reciprocal space mapping.
Journal ArticleDOI

Magnetron sputtering of Ti3SiC2 thin films from a compound target

TL;DR: In this paper, a magnetron sputtering from Ti3SiC2 and Ti targets was used to synthesize thin films with a C content of ∼50% or more, due to gas phase scattering processes and differences in angular and energy distributions between species ejected from the target.