M
Manfred Beckers
Researcher at Linköping University
Publications - 36
Citations - 1752
Manfred Beckers is an academic researcher from Linköping University. The author has contributed to research in topics: Thin film & Sputter deposition. The author has an hindex of 18, co-authored 36 publications receiving 1549 citations.
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The Mn+1AXn phases: Materials science and thin-film processing
TL;DR: A critical review of the M(n + 1)AX(n) phases from a materials science perspective is given in this article, where the authors discuss the potential for low-temperature synthesis, which is essential for deposition of MAX phases onto technologically important substrates.
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Sputter deposition from a Ti2AlC target: Process characterization and conditions for growth of Ti2AlC
TL;DR: Sputter deposition from a Ti2AlC target was found to yield Ti-Al-C films with a composition that deviated from the target composition of 2:1:1 as mentioned in this paper.
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Bonding mechanism in the nitrides Ti2AlN and TiN: An experimental and theoretical investigation
Martin Magnuson,Maurizio Mattesini,Shuyi Li,Carina Höglund,Manfred Beckers,Lars Hultman,Olle Eriksson +6 more
TL;DR: In this article, the electronic structure of nanolaminate Ti2AlN and TiN thin films has been investigated by bulk-sensitive soft x-ray emission spectroscopy.
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Effects of strain and composition on the lattice parameters and applicability of Vegard"s rule in Al-rich Al1-xInxN films grown on sapphire
Vanya Darakchieva,Manfred Beckers,Mengyao Xie,Lars Hultman,Bo Monemar,J.-F. Carlin,Eric Feltin,M. Gonschorek,Nicolas Grandjean +8 more
TL;DR: In this paper, the lattice parameters and strain evolution in Al1−xInxN films with 0.07⩽x ⩽0.22 grown on GaN-buffered sapphire substrates by metal organic vapor phase epitaxy have been studied by reciprocal space mapping.
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Magnetron sputtering of Ti3SiC2 thin films from a compound target
TL;DR: In this paper, a magnetron sputtering from Ti3SiC2 and Ti targets was used to synthesize thin films with a C content of ∼50% or more, due to gas phase scattering processes and differences in angular and energy distributions between species ejected from the target.