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Manju Gupta

Researcher at Indian Institutes of Technology

Publications -  12
Citations -  190

Manju Gupta is an academic researcher from Indian Institutes of Technology. The author has contributed to research in topics: Silicon nitride & Nitride. The author has an hindex of 7, co-authored 12 publications receiving 181 citations.

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The preparation, properties and applications of silicon nitride thin films deposited by plasma-enhanced chemical vapor deposition

TL;DR: In this article, the preparation and characterization of thin films of silicon nitride deposited by the technique of plasma-enhanced chemical vapor deposition is reviewed and the applications of silicon-nitride thin films in integrated circuit technology are also reviewed.

Perinatal Outcome After Antepartum Diagnosis of Oligohydramnios at or Beyond 34 Weeks of Gestation

TL;DR: It is found that as the volume of amniotic fluid increases, the rate of complications during pregnancy, labour and perinatal period decreases accordingly.
Journal Article

Sporotriciiosis study of 22 cases from Himachal Pradesh

TL;DR: Twenty two cases of sporotrichosis recorded in 15 years span are discussed and an uncommon extracutaneous form having osteomyelitic changes of phalangeal bones in a 14 year old boy is also described.
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Photo-processing of silicon nitride

TL;DR: In this article, photo-chemical vapour deposition (photo-CVD) was used to synthesize silicon nitride films, and the properties of the films were evaluated, including their properties on the Si/N ratio and the amount of hydrogen present in the films.
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The dependence of etch rate of photo-CVD silicon nitride films on NH4F content in buffered HF

TL;DR: In this paper, the influence of ammonium fluoride (NH 4 F) on the etch rates of silicon nitride films deposited by the mercury-sensitized photochemical vapour deposition method was studied.