N
Nicolae Damean
Researcher at Harvard University
Publications - 2
Citations - 125
Nicolae Damean is an academic researcher from Harvard University. The author has contributed to research in topics: Photoresist & SU-8 photoresist. The author has an hindex of 2, co-authored 2 publications receiving 122 citations.
Papers
More filters
Journal ArticleDOI
Composite ferromagnetic photoresist for the fabrication of microelectromechanical systems
TL;DR: By controlling the ratio of nitrogen to oxygen in the source gas as used in the CVD method, the ultimate nitrogen, carbon and fluorine concentrations in the film can be controlled and hence the dielectric constant of the film so produced is controlled.
Journal ArticleDOI
Space- and time-resolved spectrophotometry in microsystems
TL;DR: This work describes a simple optical method for obtaining, in a single still-capture image, the continuous absorbance spectra of samples at multiple locations of microsystems.