O
O.W. Holland
Researcher at Research Triangle Park
Publications - 3
Citations - 57
O.W. Holland is an academic researcher from Research Triangle Park. The author has contributed to research in topics: Ion & Ion implantation. The author has an hindex of 3, co-authored 3 publications receiving 55 citations.
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Atomic structure of collision cascades in ion-implanted silicon and channeling effects
TL;DR: In this article, the atomic structures of collision cascades in Bi + -implanted silicon were investigated and the formation of subcascades or bunching of the primary cascades was clearly observed.
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Influence of substrate heating and thermal annealing on the surface crystallinity in single Si crystals implanted with high doses of 16O
TL;DR: In this article, the dependence of near-surface crystallinity on substrate heating during high dose O/sup +/ implantation into Si and post implantation annealing was studied.
Journal ArticleDOI
Dose rate effects in silicon during heavy ion irradiation
TL;DR: In this article, the influence of dose rate on the accumulation of damage is shown to be dependent upon the mass of the implanted ions, and it was found that damage increases with dose rate for all ions studied.