An electronic device includes an n-channel transistor and a p-channel transistor. The p-channel transistor has a first gate electrode with a first work function and a first channel region including a semiconductor layer immediately adjacent to a semiconductor substrate. In one embodiment, the first work function is less than the valence band of the semiconductor layer. In another embodiment, the n-channel transistor has a second gate electrode with a second work function different from the first work function and closer to a conduction band than a valence band of a second channel region. A process of forming the electronic device includes forming first and second gate electrodes having first and second work functions, respectively. First and second channel regions having a same minority carrier type are associated with the first and second gate electrodes, respectively.

Process for forming an electronic device including a transistor having a metal gate electrode

A positive bias temperature instability (PBTI) recovery transient technique is presented to investigate trap properties in HfSiON as high-k gate dielectric in nMOSFETs. Both large- and small-area nMOSFETs are characterized. In a large-area device, the post-PBTI drain current exhibits a recovery transient and follows logarithmic time dependence. In a small-area device, individual trapped electron emission from HfSiON gate dielectric, which is manifested by a staircase-like drain current evolution with time, is observed during recovery. By measuring the temperature and gate voltage dependence of trapped electron emission times, the physical mechanism for PBTI recovery is developed. An analytical model based on thermally assisted tunneling can successfully reproduce measured transient characteristics. In addition, HfSiON trap properties, such as trap density and activation energy, are characterized by this method.

https://ir.nctu.edu.tw:443/bitstream/11536/12274/1/000237369800014.pdf

A novel transient characterization technique to investigate trap properties in HfSiON gate dielectric MOSFETs-from single electron emission to PBTI recovery transient

A semiconductor device and process including a high-k gate dielectric is described. A substrate is provided, and a high-k gate dielectric material, preferably amorphous HfSiON, is deposited over the substrate. In preferred embodiments, the high-k dielectric material includes nitrogen. In a preferred embodiment, a silicon nitride layer is deposited using jet vapor deposition (JVD) on the high-k dielectric material. When the JVD nitride layer is deposited according to preferred embodiments, the layer has a low density of charge traps, it maintains comparable carrier mobility and provides better EOT compared to oxide or oxynitride. A second nitrogen-containing layer formed between the high-k dielectric and the gate electrode acts as a diffusion barrier. It also reduces problems relating to oxygen vacancy formation in high-k dielectric and therefore minimizes Fermi-level pinning.

Semiconductor device and method for high-K gate dielectrics

A process and apparatus for a semiconductor device is provided. A device comprises a first transistor having a first charge carrier type. The first transistor comprises a high-k gate dielectric and a first doped electrode. The first charge carrier type comprises one of p-type and n-type and the first doped electrode comprises the other of p-type and n-type. The device further comprises a second transistor having a charge carrier type opposite the first charge carrier type. The second transistor comprises the high-k gate dielectric, and a second doped electrode, wherein the second doped electrode comprises the other of p-type and n-type.

Semiconductor device with high-k gate dielectric and quasi-metal gate, and method of forming thereof

This exploratory study on vertical, undoped silicon nanowire transistors shows less power dissipation with respect to the bulk and SOI MOS transistors while yielding comparable performance. The design cycle starts with determining individual metal gate work functions for each nMOS and pMOS transistor as a function of wire radius to produce a 300 mV threshold voltage. Wire radius and effective channel length are both varied until a common body geometry is determined for both nMOS and pMOS transistors to limit off currents under 1 pA while producing highest on currents. DC characteristics of the optimum n and p-channel transistors such as threshold voltage roll-off, DIBL and subthreshold slope are measured; simple CMOS gates including an inverter, 2- and 3-input nand, nor, and xor gates, and full adder are built to measure the transient performance, power dissipation and layout area. Postlayout simulation results indicate that the worst case delay for a full adder circuit is 8.5 ps at no load and increases by 0.15 ps/aF; worst case power dissipation of the same circuit is 23.6 nW at no load and increases by 4.04 nW/aF at 1 GHz. The full adder layout area occupies approximately 0.11 mum2

The Design of Dual Work Function CMOS Transistors and Circuits Using Silicon Nanowire Technology

We report solutions to the formidable challenges posed by integrating a HfSiON dielectric with a poly-Si gate for low-power device technology. A 1.5 nm EOT HfSiON is demonstrated with mobility comparable to SiO/sub 2/ and 3 orders of magnitude leakage reduction. A novel boron delta-doped strained-SiGe channel points a way out of the high threshold voltage problem associated with Fermi-pinning at the high-k/poly-Si interface and ameliorates short-channel effects in PMOS devices. In addition, a 20% hole mobility enhancement and 15% I/sub on/-I/sub off/ characteristics improvement are achieved owing to the compressive SiGe channel. NMOS PBTI lifetime of 35 years, and PMOS NBTI and NMOS hot carrier lifetimes of more than 1000 years are demonstrated at 1.2 V.

Peng-Soon Lim

Papers

Low power device technology with SiGe channel, HfSiON, and poly-Si gate