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Philip Paul

Researcher at IBM

Publications -  16
Citations -  273

Philip Paul is an academic researcher from IBM. The author has contributed to research in topics: Thermal scanning probe lithography & Resist. The author has an hindex of 7, co-authored 16 publications receiving 255 citations.

Papers
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Journal ArticleDOI

Directed placement of gold nanorods using a removable template for guided assembly.

TL;DR: A temperature sensitive polymer film is used as a removable template to position, and align, gold nanorods onto an underlying target substrate with an overall positioning accuracy of ≈10 nm onto an unstructured target substrate.
Journal ArticleDOI

Rapid turnaround scanning probe nanolithography.

TL;DR: A complete lithography and metrology system based on thermomechanical writing into organic resists capable of implementing rapid turnaround and carried out using a thermoelectric topography sensing method is presented.
Journal ArticleDOI

Thermal Probe Maskless Lithography for 27.5 nm Half-Pitch Si Technology

TL;DR: The demonstrated process capabilities in terms of feature density and line-edge roughness are in accordance with today's requirements for maskless lithography, for example for the fabrication of extreme ultraviolet (EUV) masks.
Proceedings ArticleDOI

Thermal probe nanolithography: in-situ inspection, high-speed, high-resolution, 3D

TL;DR: In this article, an all-dry tri-layer pattern transfer concept was used to create high aspect ratio structures in silicon. But the accuracy of the patterning depth can be controlled independently and accurately at each position.
Patent

Accurate deposition of nano-objects on a surface

TL;DR: In this paper, a method for depositing nano-objects on a surface is proposed, which includes: providing a substrate with surface patterns on one face thereof; providing a transfer layer on said face of the substrate; functionalizing areas on the surface of the transfer layer parallel to the substrate, at locations defined with respect to the surface patterns.