P
Philip Paul
Researcher at IBM
Publications - 16
Citations - 273
Philip Paul is an academic researcher from IBM. The author has contributed to research in topics: Thermal scanning probe lithography & Resist. The author has an hindex of 7, co-authored 16 publications receiving 255 citations.
Papers
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Journal ArticleDOI
Directed placement of gold nanorods using a removable template for guided assembly.
Felix Holzner,Cyrill Kuemin,Cyrill Kuemin,Philip Paul,James L. Hedrick,Heiko Wolf,Nicholas D. Spencer,Urs T. Duerig,Armin W. Knoll +8 more
TL;DR: A temperature sensitive polymer film is used as a removable template to position, and align, gold nanorods onto an underlying target substrate with an overall positioning accuracy of ≈10 nm onto an unstructured target substrate.
Journal ArticleDOI
Rapid turnaround scanning probe nanolithography.
TL;DR: A complete lithography and metrology system based on thermomechanical writing into organic resists capable of implementing rapid turnaround and carried out using a thermoelectric topography sensing method is presented.
Journal ArticleDOI
Thermal Probe Maskless Lithography for 27.5 nm Half-Pitch Si Technology
Lin Lee Cheong,Philip Paul,Felix Holzner,Michel Despont,Daniel J. Coady,James L. Hedrick,Robert D. Allen,Armin W. Knoll,Urs T. Duerig +8 more
TL;DR: The demonstrated process capabilities in terms of feature density and line-edge roughness are in accordance with today's requirements for maskless lithography, for example for the fabrication of extreme ultraviolet (EUV) masks.
Proceedings ArticleDOI
Thermal probe nanolithography: in-situ inspection, high-speed, high-resolution, 3D
Felix Holzner,Felix Holzner,Philip Paul,Michel Despont,Lin Lee Cheong,Lin Lee Cheong,James L. Hedrick,Urs Dürig,Armin W. Knoll +8 more
TL;DR: In this article, an all-dry tri-layer pattern transfer concept was used to create high aspect ratio structures in silicon. But the accuracy of the patterning depth can be controlled independently and accurately at each position.
Patent
Accurate deposition of nano-objects on a surface
TL;DR: In this paper, a method for depositing nano-objects on a surface is proposed, which includes: providing a substrate with surface patterns on one face thereof; providing a transfer layer on said face of the substrate; functionalizing areas on the surface of the transfer layer parallel to the substrate, at locations defined with respect to the surface patterns.