R
R. Khanna
Researcher at Massachusetts Institute of Technology
Publications - 9
Citations - 443
R. Khanna is an academic researcher from Massachusetts Institute of Technology. The author has contributed to research in topics: Microelectromechanical systems & Deep reactive-ion etching. The author has an hindex of 9, co-authored 9 publications receiving 434 citations.
Papers
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Journal ArticleDOI
High-speed microfabricated silicon turbomachinery and fluid film bearings
Luc G. Fréchette,Stuart A. Jacobson,Kenneth S. Breuer,F. F. Ehrich,Reza Ghodssi,R. Khanna,Chee Wei Wong,Xin Zhang,Martin A. Schmidt,Alan H. Epstein +9 more
TL;DR: In this paper, a single-crystal silicon micromachined air turbine supported on gas-lubricated bearings has been operated in a controlled and sustained manner at rotational speeds greater than 1 million revolutions per minute, with mechanical power levels approaching 5 W.
Journal ArticleDOI
Multi-stack silicon-direct wafer bonding for 3D MEMS manufacturing
TL;DR: In this article, the problems and the solutions presented in this paper are readily applicable to any microelectromechanical system project involving the fabrication of multi-stack structures of two or more wafers containing intricate geometries and large etched areas.
Proceedings Article
Multi-stack silicon-direct wafer bonding for 3D MEMS manufacturing
TL;DR: In this article, the problems and the solutions presented in this paper are readily applicable to any microelectromechanical system project involving the fabrication of multi-stack structures of two or more wafers containing intricate geometries and large etched areas.
Journal ArticleDOI
Anisotropic silicon trenches 300–500 μm deep employing time multiplexed deep etching (TMDE)
TL;DR: In this paper, the problem of profile control of narrow trenches in the vicinity of wider topographic features, as well as for etching high aspect ratio, anisotropic trenches with depths in the 300-500μm range, and widths between 12 to 18μm.
Journal ArticleDOI
Fabrication and Testing of a High-Speed Microscale Turbocharger
N. Savoulides,Stuart A. Jacobson,Hanqing Li,Linhvu Ho,R. Khanna,Chiang Juay Teo,J.M. Protz,Li Wang,D. Ward,Martin A. Schmidt,Alan H. Epstein +10 more
TL;DR: A microelectromechanical system (MEMS) turbocharger has been designed, fabricated, and tested as part of a Massachusetts Institute of Technology program aimed at producing a microfabricated gas turbine engine for portable power applications as discussed by the authors.