scispace - formally typeset
R

Richard E. Cavicchi

Researcher at National Institute of Standards and Technology

Publications -  109
Citations -  3931

Richard E. Cavicchi is an academic researcher from National Institute of Standards and Technology. The author has contributed to research in topics: Thin film & Tin oxide. The author has an hindex of 33, co-authored 107 publications receiving 3796 citations. Previous affiliations of Richard E. Cavicchi include Cornell University.

Papers
More filters
Journal ArticleDOI

Tin oxide gas sensor fabricated using CMOS micro-hotplates and in-situ processing

TL;DR: In this paper, a monolithic tin oxide (SnO/sub 2/) gas sensor realized by commercial CMOS foundry fabrication (MOSIS) and postfabrication processing techniques is reported.
Journal ArticleDOI

Microhotplate Platforms for Chemical Sensor Research

TL;DR: The surface-micromachined "microhotplate" structure was originally designed for fabricating conductometric gas microsensor prototypes and is particularly well suited for examining temperature-dependent phenomena on a micro-scale as mentioned in this paper.
Journal ArticleDOI

A monolithic CMOS microhotplate-based gas sensor system

TL;DR: In this paper, a monolithic CMOS microhotplate-based conductance-type gas sensor system is described, where a bulk micromachining technique is used to create suspended microhot plate structures that serve as sensing film platforms.
Journal ArticleDOI

Surface state trapping models for SnO2-based microhotplate sensors

TL;DR: In this paper, an intrinsic and extrinsic surface state trapping model is presented to describe the dynamic conductance responses of microhotplate gas sensors to argon and to air, respectively.