R
Roozbeh Tabrizian
Researcher at University of Florida
Publications - 76
Citations - 1008
Roozbeh Tabrizian is an academic researcher from University of Florida. The author has contributed to research in topics: Resonator & Silicon. The author has an hindex of 15, co-authored 70 publications receiving 775 citations. Previous affiliations of Roozbeh Tabrizian include University of Michigan & Georgia Institute of Technology.
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Proceedings ArticleDOI
Effect of phonon interactions on limiting the f.Q product of micromechanical resonators
TL;DR: In this paper, the authors discuss the contribution of phonon interactions in determining the upper limit of the f.Q product in micromechanical resonators, and show that for frequencies higher than ω τ = 1/τ, where τ is the phonon relaxation time, the FQ product is no longer constant but a linear function of frequency.
Journal ArticleDOI
Temperature-Stable Silicon Oxide (SilOx) Micromechanical Resonators
TL;DR: In this article, a uniformly distributed matrix of silicon dioxide pillars is embedded inside the silicon substrate to form a homogenous composite silicon oxide platform (SilOx) with nearly perfect temperature-compensated stiffness moduli.
Journal ArticleDOI
Dual-Mode AlN-on-Silicon Micromechanical Resonators for Temperature Sensing
TL;DR: In this paper, a dual-mode AlN-on-silicon micromechanical resonators for self-temperature sensing were proposed, which provides a 50× improvement in temperature coefficient of beat frequency (TCfb) compared with single-mode temperature measurement and eliminates the need for additional frequency multipliers to generate fb from its constituents.
Proceedings ArticleDOI
A 27 MHz temperature compensated MEMS oscillator with sub-ppm instability
TL;DR: In this paper, an array of silicon dioxide (SiO 2 ) pillars has been uniformly embedded in the body of a piezoelectrically transduced silicon resonator to compensate its negative temperature coefficient of frequency (TCF).
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High-Frequency AlN-on-Silicon Resonant Square Gyroscopes
TL;DR: In this paper, a high-frequency resonant square micro-gyroscope using piezoelectric transduction was presented, achieving linear rate sensitivity of 20.38 μV/°/s when operating in its first flexural mode at ~ 11 MHz.