R
Ruben Schupp
Researcher at Max Planck Society
Publications - 26
Citations - 294
Ruben Schupp is an academic researcher from Max Planck Society. The author has contributed to research in topics: Laser & Extreme ultraviolet lithography. The author has an hindex of 8, co-authored 23 publications receiving 179 citations. Previous affiliations of Ruben Schupp include TRIUMF.
Papers
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Journal ArticleDOI
Prominent radiative contributions from multiply-excited states in laser-produced tin plasma for nanolithography.
Francesco Torretti,John Sheil,Ruben Schupp,M. M. Basko,Muharrem Bayraktar,Randy Meijer,Stefan Witte,Wim Ubachs,Ronnie Hoekstra,Oscar Versolato,Amanda Neukirch,James Colgan +11 more
TL;DR: This work calculates detailed tin opacity spectra using the Los Alamos atomic physics suite ATOMIC and validate these calculations with experimental comparisons to reveal the doubly magic behavior of tin and the origins of the EUV light.
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Efficient Generation of Extreme Ultraviolet Light From Nd: YAG-Driven Microdroplet-Tin Plasma
Ruben Schupp,Francesco Torretti,Randy Meijer,Muharrem Bayraktar,Joris Scheers,Dmitry Kurilovich,Alex Bayerle,Kjeld S. E. Eikema,Stefan Witte,Wim Ubachs,Ronnie Hoekstra,Oscar Versolato +11 more
TL;DR: In this paper, the authors investigated the emission of EUV light from a mass-limited laser-produced plasma over a wide parameter range by varying the diameter of the targeted tin microdroplets and the pulse duration and energy of the 1-mu m-wavelength Nd:YAG drive laser.
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Power-law scaling of plasma pressure on laser-ablated tin microdroplets
Dmitry Kurilovich,M. M. Basko,Dmitrii Andreevich Kim,Francesco Torretti,Ruben Schupp,Jim C. Visschers,Joris Scheers,Ronnie Hoekstra,Wim Ubachs,Oscar Versolato +9 more
TL;DR: In this paper, the propulsion velocity of metallic microdroplets exposed to nanosecond laser pulses was measured over three decades in the driving Nd:YAG laser pulse energy and observed a near-perfect power law dependence.
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Expansion Dynamics after Laser-Induced Cavitation in Liquid Tin Microdroplets
Dmitry Kurilovich,Tiago de Faria Pinto,Francesco Torretti,Ruben Schupp,Joris Scheers,Aneta Stodolna,Hanneke Gelderblom,Kjeld S. E. Eikema,Stefan Witte,Wim Ubachs,Ronnie Hoekstra,Oscar Versolato +11 more
TL;DR: In this article, the cavitation-driven expansion dynamics of liquid tin microdroplets set in motion by the ablative impact of a 15-ps laser pulse is investigated, and the late-time mass distributions obtained are governed by a single parameter.
Journal ArticleDOI
Radiation transport and scaling of optical depth in Nd: YAG laser-produced microdroplet-tin plasma
Ruben Schupp,Francesco Torretti,Randy Meijer,Muharrem Bayraktar,John Sheil,Joris Scheers,Dmitry Kurilovich,Alex Bayerle,Alexander Schafgans,Michael Purvis,Kjeld S. E. Eikema,Stefan Witte,Wim Ubachs,Ronnie Hoekstra,Oscar Versolato +14 more
TL;DR: In this paper, an experimental scaling relation of the optical depth of a tin-droplet-based, 1-μm-laser-produced plasma source of extreme-ultraviolet (EUV) light is presented.