S
S. Damle
Researcher at University of Texas at Austin
Publications - 1
Citations - 643
S. Damle is an academic researcher from University of Texas at Austin. The author has contributed to research in topics: Etching (microfabrication) & Photomask. The author has an hindex of 1, co-authored 1 publications receiving 624 citations.
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Proceedings ArticleDOI
Step and flash imprint lithography: a new approach to high-resolution patterning
Matthew E. Colburn,Stephen C. Johnson,Michael D. Stewart,S. Damle,Todd Bailey,Bernard Choi,M. Wedlake,Timothy Michaelson,Sidlgata V. Sreenivasan,John G. Ekerdt,C. Grant Willson +10 more
TL;DR: In this article, a template is created on a standard mask blank by using the patterned chromium as an etch mask to produce high-resolution relief images in the quartz.