S
Sven Michaelis
Researcher at Infineon Technologies
Publications - 9
Citations - 317
Sven Michaelis is an academic researcher from Infineon Technologies. The author has contributed to research in topics: Microelectromechanical systems & CMOS. The author has an hindex of 8, co-authored 9 publications receiving 309 citations.
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Additive electroplating technology as a post-CMOS process for the production of MEMS acceleration-threshold switches for transportation applications
TL;DR: In this article, an acceleration threshold sensor fabricated with an electroplating technology is presented, which can be integrated on top of a pre-processed CMOS signal processing circuit.
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Low-cost post-CMOS integration of electroplated microstructures for inertial sensing
TL;DR: Tonnesen et al. as discussed by the authors presented an additive integration technology for fabrication of MEMS with an electroplating technology on top of a CMOS signal processing circuit, which can be manufactured using a low cost CMOS production line and adding the mechanical sensor elements via a specialized back-end process.
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A low-voltage torsional actuator for application in RF-microswitches
TL;DR: In this article, a surface micromachined torsional actuator for integrated microswitches is presented, which requires an actuation voltage below 10 V and is fabricated in a BiCMOS compatible process.
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Acceleration threshold switches from an additive electroplating MEMS process
TL;DR: In this article, an acceleration threshold sensor fabricated with an electroplating technology on top of a CMOS signal processing circuit is presented, which is achieved using a standard low-cost CMOS production line and employing a specialized back-end process for adding the mechanical sensor-elements.
Journal ArticleDOI
Silicon micromachined microphone chip at Siemens
Alfons Dehe,Thomas Bever,Stephan Schmitt,Sven Michaelis,Hans-Jörg Timme,Ewald Pettenpaul,Klaus-Guenter Oppermann,Robert Aigner +7 more
TL;DR: In this paper, a single-chip capacitive microphone has been developed at Siemens, utilizing a modified standard CMOS process with adjacent bulk micromachining, enabling low output impedance of the signal.