http://www.diit.unict.it/users/spalazzo/materiale/Nanonetworks_Survey.pdf

Nanonetworks: A new communication paradigm

Part I: Background and Fundamentals Introduction, Mohamed Gad-el-Hak, University of Notre Dame Scaling of Micromechanical Devices, William Trimmer, Standard MEMS, Inc., and Robert H. Stroud, Aerospace Corporation Mechanical Properties of MEMS Materials, William N. Sharpe, Jr., Johns Hopkins University Flow Physics, Mohamed Gad-el-Hak, University of Notre Dame Integrated Simulation for MEMS: Coupling Flow-Structure-Thermal-Electrical Domains, Robert M. Kirby and George Em Karniadakis, Brown University, and Oleg Mikulchenko and Kartikeya Mayaram, Oregon State University Liquid Flows in Microchannels, Kendra V. Sharp and Ronald J. Adrian, University of Illinois at Urbana-Champaign, Juan G. Santiago and Joshua I. Molho, Stanford University Burnett Simulations of Flows in Microdevices, Ramesh K. Agarwal and Keon-Young Yun, Wichita State University Molecular-Based Microfluidic Simulation Models, Ali Beskok, Texas A&M University Lubrication in MEMS, Kenneth S. Breuer, Brown University Physics of Thin Liquid Films, Alexander Oron, Technion, Israel Bubble/Drop Transport in Microchannels, Hsueh-Chia Chang, University of Notre Dame Fundamentals of Control Theory, Bill Goodwine, University of Notre Dame Model-Based Flow Control for Distributed Architectures, Thomas R. Bewley, University of California, San Diego Soft Computing in Control, Mihir Sen and Bill Goodwine, University of Notre Dame Part II: Design and Fabrication Materials for Microelectromechanical Systems Christian A. Zorman and Mehran Mehregany, Case Western Reserve University MEMS Fabrication, Marc J. Madou, Nanogen, Inc. LIGA and Other Replication Techniques, Marc J. Madou, Nanogen, Inc. X-Ray-Based Fabrication, Todd Christenson, Sandia National Laboratories Electrochemical Fabrication (EFAB), Adam L. Cohen, MEMGen Corporation Fabrication and Characterization of Single-Crystal Silicon Carbide MEMS, Robert S. Okojie, NASA Glenn Research Center Deep Reactive Ion Etching for Bulk Micromachining of Silicon Carbide, Glenn M. Beheim, NASA Glenn Research Center Microfabricated Chemical Sensors for Aerospace Applications, Gary W. Hunter, NASA Glenn Research Center, Chung-Chiun Liu, Case Western Reserve University, and Darby B. Makel, Makel Engineering, Inc. Packaging of Harsh-Environment MEMS Devices, Liang-Yu Chen and Jih-Fen Lei, NASA Glenn Research Center Part III: Applications of MEMS Inertial Sensors, Paul L. Bergstrom, Michigan Technological University, and Gary G. Li, OMM, Inc. Micromachined Pressure Sensors, Jae-Sung Park, Chester Wilson, and Yogesh B. Gianchandani, University of Wisconsin-Madison Sensors and Actuators for Turbulent Flows. Lennart Loefdahl, Chalmers University of Technology, and Mohamed Gad-el-Hak, University of Notre Dame Surface-Micromachined Mechanisms, Andrew D. Oliver and David W. Plummer, Sandia National Laboratories Microrobotics Thorbjoern Ebefors and Goeran Stemme, Royal Institute of Technology, Sweden Microscale Vacuum Pumps, E. Phillip Muntz, University of Southern California, and Stephen E. Vargo, SiWave, Inc. Microdroplet Generators. Fan-Gang Tseng, National Tsing Hua University, Taiwan Micro Heat Pipes and Micro Heat Spreaders, G. P. "Bud" Peterson, Rensselaer Polytechnic Institute Microchannel Heat Sinks, Yitshak Zohar, Hong Kong University of Science and Technology Flow Control, Mohamed Gad-el-Hak, University of Notre Dame) Part IV: The Future Reactive Control for Skin-Friction Reduction, Haecheon Choi, Seoul National University Towards MEMS Autonomous Control of Free-Shear Flows, Ahmed Naguib, Michigan State University Fabrication Technologies for Nanoelectromechanical Systems, Gary H. Bernstein, Holly V. Goodson, and Gregory L. Snider, University of Notre Dame Index

The MEMS Handbook

A new field of organic materials science that deals with amorphous molecular glasses has been opened up. In addition, amorphous molecular materials have constituted a new class of functional organic materials for use in various applications. This article is focused on the recent progress of studies on photo- and electroactive amorphous molecular materials, highlighting photochromic amorphous molecular materials, amorphous molecular resists, and amorphous molecular materials for use in devices such as organic EL devices. The molecular design concepts, syntheses, reactions, molecular and solid-state properties, functions, and device fabrication and performance are described.

Photo- and electroactive amorphous molecular materials—molecular design, syntheses, reactions, properties, and applications

This Review summarizes methods for constructing systems and structures at micron or submicron scales that have applications in microbiology. These tools make it possible to manipulate individual cells and their immediate extracellular environments and have the capability to transform the study of microbial physiology and behaviour. Because of their simplicity, low cost and use in microfabrication, we focus on the application of soft lithographic techniques to the study of microorganisms, and describe several key areas in microbiology in which the development of new microfabricated materials and tools can have a crucial role.

/pdf/microfabrication-meets-microbiology-3fk5svoxk6.pdf

Microfabrication meets microbiology

In the last two decades, considerable progress has been made in the field of molecular biology, which has enabled a molecular-level understanding of a number of interesting biological events. In particular, the discovery of a family of moving proteins and their assemblies has attracted particular attention not only of biologists but also of chemists and physicists.1-5 In response to certain biological stimuli, these proteins perform directed or programmed motions, similar to many tools and machines used in our daily life. Such biological molecular machines play essential roles in a wide variety of biological events, particularly those related to the activities of cells,1 and realize specific functions through their stimuliresponsive mechanical motions. Cytoplasmic proteins such as myosins, kinesins, and dyneins are called “molecular motors” and are the most extensively studied molecular machines.2-5 These protein-based supramolecular conjugates are known to switch back and forth along linear tracks of actin filaments or microtubules and transport substrates at the expense of adenosine triphosphate (ATP) as fuel. The flagellum is a huge protein conjugate that controls the swimming motion of bacteria.6 The bacterial flagellar motor consists of (1) flagellar filaments that are 15 μm long and 120-250 Å in diameter and a (2) motor domain that rotates the flagellar filaments alternately in clockwise and anticlockwise directions. This unique behavior of rotation allows bacteria to swim desirably. ATP synthase is a different type of a molecular machine, which synthesizes and hydrolyzes ATP through its rotary motion.7-9 ATP synthase is built up of two different machinery components, that is, F1 and F0, where the rotation of the former is driven by the free energy released from the hydrolysis of ATP to adenosine diphosphate (ADP); the latter rotates by a flux of ions passing through a membrane and synthesizes ATP. This huge protein complex has a shaft, which rotates just like real rotary motors. Since the rotary motion of ATP synthase occurs in a stepwise manner in response to the hydrolysis of ATP, it is regarded as a biological stepping motor. In addition to these molecular motors, some other biological machines are known, where the hydrolysis of ATP triggers different types of mechanical motions. Representative examples include the family of chap† The University of Tokyo. ‡ PRESTO. 1377 Chem. Rev. 2005, 105, 1377−1400

/pdf/toward-intelligent-molecular-machines-directed-motions-of-5biq6jkgio.pdf

Toward intelligent molecular machines: directed motions of biological and artificial molecules and assemblies.

Controlling the Direction of Kinesin-Driven Microtubule Movements along Microlithographic Tracks

Biological molecular motors have a number of unique advantages over artificial motors, including efficient conversion of chemical energy into mechanical work and the potential for self-assembly into larger structures, as is seen in muscle sarcomeres and bacterial and eukaryotic flagella. The development of an appropriate interface between such biological materials and synthetic devices should enable us to realize useful hybrid micromachines. Here we describe a microrotary motor composed of a 20-μm-diameter silicon dioxide rotor driven on a silicon track by the gliding bacterium Mycoplasma mobile. This motor is fueled by glucose and inherits some of the properties normally attributed to living systems.

https://www.pnas.org/content/pnas/103/37/13618.full.pdf

A microrotary motor powered by bacteria

Electron beam (e-beam) irradiation has been found to reduce the dissolution rate of evaporated C60 films in organic solvents such as monochlorobenzene, which shows that this material acts as a negative e-beam resist with a sensitivity of 1×10-2 C/cm2. It has higher dry-etch durability than conventional novolac resists. Its applicability to nanofabrication has been demonstrated by fabricating Si pillars of 20–30 nm diameter using electron cyclotron resonance microwave plasma etching and dot patterns defined in the C60 film as etching masks.

https://iopscience.iop.org/article/10.1143/JJAP.35.L63/pdf

Nanolithography Using Fullerene Films as an Electron Beam Resist

A semiconductor graphene is used for a channel layer, and a metal graphene is used for electrode layers for a source, a drain, and a gate which serve as interconnections as well. An oxide is used for a gate insulating layer. The channel layer and the electrode layers are located on the same plane.

Semiconductor device using graphene and method of manufacturing the same

In recent years, nanostructured thermoelectric materials have attracted much attention. However, despite this increasing attention, available information on the thermoelectric properties of single-crystal Si is quite limited, especially for high doping concentrations at high temperatures. In this study, the thermoelectric properties of heavily doped (1018–1020 cm−3) n- and p-type single-crystal Si were studied from room temperature to above 1000 K. The figures of merit, ZT, were calculated from the measured data of electrical conductivity, Seebeck coefficient, and thermal conductivity. The maximum ZT values were 0.015 for n-type and 0.008 for p-type Si at room temperature. To better understand the carrier and phonon transport and to predict the thermoelectric properties of Si, we have developed a simple theoretical model based on the Boltzmann transport equation with the relaxation-time approximation.

https://iopscience.iop.org/article/10.7567/JJAP.54.071301/pdf

Tetsuya Tada

Papers

Controlling the Direction of Kinesin-Driven Microtubule Movements along Microlithographic Tracks

A microrotary motor powered by bacteria

Nanolithography Using Fullerene Films as an Electron Beam Resist

Semiconductor device using graphene and method of manufacturing the same

Thermoelectric properties of heavily boron- and phosphorus-doped silicon