Methods and systems for determining a critical dimension and overlay of a specimen

A device for measuring eye movements is suitable for stand-alone, portable use and for integration into a head/helmet mounted display The low-cost non-imaging eye tracking system is optimized toward the applications requiring computer cursor control by localizing the gaze direction as an operator looks through a fixed frame to provide pointing information to a computer

Low-cost non-imaging eye tracker system for computer control

The growing demand for electricity and the increasing size of the carbon footprint of data centers worldwide bring a severe challenge to sustainable development of human civilization. The cooling energy consumption takes up around 30–50% of the total consumption of data centers due to the inefficient cooling system. Free cooling is an effective solution for reducing the power consumption of cooling systems. This paper reviews the advancements of data center free cooling mainly focusing on configuration features and performances. Three kinds of free cooling methods, airside free cooling, waterside free cooling and heat pipe free cooling are discussed and performance characteristics of each are analyzed. Further, the criteria of performance evaluation for free cooling of data centers are summarized, and an overview of free cooling systems based on these criteria is demonstrated in order to help researchers acquire the latest developments in this area.

Free cooling of data centers: A review

Methods and systems for determining a critical dimension and a thin film characteristic of a specimen

A system and method for eye gaze tracking in human or animal subjects without calibration of cameras, specific measurements of eye geometries or the tracking of a cursor image on a screen by the subject through a known trajectory. The preferred embodiment includes one uncalibrated camera for acquiring video images of the subject's eye(s) and optionally having an on-axis illuminator, and a surface, object, or visual scene with embedded off-axis illuminator markers. The off-axis markers are reflected on the corneal surface of the subject's eyes as glints. The glints indicate the distance between the point of gaze in the surface, object, or visual scene and the corresponding marker on the surface, object, or visual scene. The marker that causes a glint to appear in the center of the subject's pupil is determined to be located on the line of regard of the subject's eye, and to intersect with the point of gaze. Point of gaze on the surface, object, or visual scene is calculated as follows. First, by determining which marker glints, as provided by the corneal reflections of the markers, are closest to the center of the pupil in either or both of the subject's eyes. This subset of glints forms a region of interest (ROI). Second, by determining the gaze vector (relative angular or cartesian distance to the pupil center) for each of the glints in the ROI. Third, by relating each glint in the ROI to the location or identification (ID) of a corresponding marker on the surface, object, or visual scene observed by the eyes. Fourth, by interpolating the known locations of each these markers on the surface, object, or visual scene, according to the relative angular distance of their corresponding glints to the pupil center.

Method and apparatus for calibration-free eye tracking

In a photolithographic process utilizing a wafer coated with a chemically amplified photoresist, a method for controlling a line dimension. The method comprises the steps of measuring at at least two times, and from at least two angles, evolving signals comprising intensities of light diffracted from a portion of an exposed patterned area on the waver, the evolving signals corresponding to vector combinations of time dependent light diffracted from the pattern appearing in the photoresist; and substantially time invariant light diffracted due to any underlying pattern beneath the photoresist; and, combining the measurements mathematically for extracting a contribution due to the pattern evolving in the photoresist.

Method for controlling a line dimension arising in photolithographic processes

In one embodiment, the invention is a method and apparatus for chip cooling. One embodiment of an apparatus for cooling a heat-generating device includes an inlet for receiving a fluid, a manifold comprising a plurality of apertures formed therein for decreasing the pressure of the fluid from a first pressure by adiabatic expansion for impinging the fluid on the heat-generating device once the pressure of the fluid is decreased from the first pressure.

Method and apparatus for chip cooling

Techniques for cooling in a data center are provided In one aspect, a computer equipment rack is provided comprising one or more air inlets; one or more exhaust outlets; and one or more of: an air inlet duct mounted to the computer equipment rack surrounding at least a portion of the air inlets, the air inlet duct having a lateral dimension that approximates a lateral dimension of the computer equipment rack and a length that is less than a length of the computer equipment rack, and an air exhaust duct mounted to the computer equipment rack surrounding at least a portion of the exhaust outlets, the air exhaust duct having a lateral dimension that approximates the lateral dimension of the computer equipment rack and a length that is less than the length of the computer equipment rack

Techniques for Data Center Cooling

An inexpensive eye tracking system requires no head gear. The eye tracking system uses the interference fringes between the corneal glint and the "red eye" retinal reflection to obtain an angularly resolved, background-immune eye point signal for use as a pointing device for personal computers. Tunable (eye safe) diode laser spectroscopy is used to measure the period and amplitude of the Fabry-Perot fringes caused by the interference between the corneal glint and the "red" reflection form the retina.

Inexpensive interferometric eye tracking system

The present invention is a thermal interface for coupling a heat source to a heat sink. One embodiment of the invention comprises a mesh and a liquid, e.g., a thermally conductive liquid, disposed in the mesh. The mesh and the thermally conductive liquid are adapted to contact both the heat source and the heat sink when disposed therebetween. In one embodiment, the mesh may comprise a metal or organic material compatible with the liquid. In one embodiment, the liquid may comprise liquid metal. For example, the liquid may comprise a gallium indium tin alloy. A gasket may optionally be used to seal the mesh and the liquid between the heat source and the heat sink. In one embodiment, the heat source is an integrated circuit chip.

Theodore G. Van Kessel

Papers

Method for controlling a line dimension arising in photolithographic processes

Method and apparatus for chip cooling

Techniques for Data Center Cooling

Inexpensive interferometric eye tracking system

Heterogeneous thermal interface for cooling