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Wei-Yu Chen
Researcher at National Tsing Hua University
Publications - 5
Citations - 210
Wei-Yu Chen is an academic researcher from National Tsing Hua University. The author has contributed to research in topics: Silicon carbide & Carbide. The author has an hindex of 4, co-authored 5 publications receiving 199 citations.
Papers
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Journal ArticleDOI
Synthesis of graphene on silicon carbide substrates at low temperature
Zhen-Yu Juang,Chih-Yu Wu,Chien-Wei Lo,Wei-Yu Chen,Chih-Fang Huang,Jenn-Chang Hwang,Fu-Rong Chen,Keh-Chyang Leou,Chuen-Horng Tsai +8 more
TL;DR: In this article, a method for the synthesis of millimeter-scaled graphene films on silicon carbide substrates at low temperatures (750 °C) was presented, where Ni thin films were coated on a silicon carbides substrate and used to extract the substrate's carbon atoms under rapid heating.
Journal ArticleDOI
Crystal Quality of 3C-SiC Influenced by the Diffusion Step in the Modified Four-Step Method
Wei-Yu Chen,Wei Lin Wang,Jui Min Liu,Chien Cheng Chen,Jenn Chang Hwang,Chih-Fang Huang,Li Chang +6 more
TL;DR: The atomic arrangement and bonding characteristics of void-free 3C-SiC/Si(100) grown by the modified four-step method are presented in this paper, where the diffusion step helps the formation of Si-C bonds more completely and results in a SiC buffer layer of high quality formed on Si(100).
Journal ArticleDOI
Growth of 3C-SiC on si(111) using the four-step non-cooling process
TL;DR: A modified four-step method was applied to grow a 3C-SiC thin film of high quality on the off-axis 1.5° Si(111) substrate in a mixed gas of C 3 H 8, SiH 4 and H 2 using low pressure chemical vapor deposition.
Patent
Method of fabricating silicon carbide (SiC) layer
TL;DR: In this paper, a method of fabricating a silicon carbide (SiC) layer is disclosed, which comprises steps: (S1) heating a silicon-based substrate at a temperature of X ° C; (S2) carburizating the silicon-bounded substrate with a first hydrocarbon-containing gas at temperature of Y ° C.
Journal ArticleDOI
Diffusivity of Si in the 3C-SiC buffer layer on Si(100) by X-ray photoelectron spectroscopy
TL;DR: In this article, a void free 3C-SiC film grown on Si(100) can be achieved by low pressure chemical vapor deposition using the modified four-step method, where the diffusion step plays an important role to enhance the quality of the 3CSiC buffer layer.