Yasushi Sanada

TL;DR: In this article, a computer detects presence of a plurality of repeated pattern areas from layout information contained in the designed pattern data, reads the arrangement, the number, the dimension and the repeated pitch of the repeated pattern area, and automatically fetches an inspection area of the die-to-die comparison method.

TL;DR: A battery pack of a battery includes a plurality of laminated cells that are hermetically sealed by a laminated film, a case for storing the plurality of the cells, a positive electrode terminal and a negative electrode terminal of the battery for connecting the cells in parallel or series for connection to the outside of the case, a lid member for pressing the cells from the uppermost surface of the laminate of the cell stored in the case toward the inner side in the direction opposite to the laminating direction, and a fixing member for fixing the lid member to the case at

TL;DR: In this paper, a high-resolution mask inspection platform using DUV wavelength has been developed to enable the defect inspection of high quality masks for 65nm node used in 193nm lithography.

TL;DR: In this article, a battery pack of group of batteries with a simple structure and simple order without increasing the number of components as much as possible, and a fixing method of the battery pack is proposed.

TL;DR: In this article, a gas processing apparatus of an embodiment includes: first and second dielectric substrates facing with each other, a gas flow path to supply gas to be processed between the discharge electrodes, and an AC power source to generate first-and second plasma-induced flows by applying an AC voltage between discharge electrodes and the ground electrodes.