International Conference on Micro Electro Mechanical Systems 

About: International Conference on Micro Electro Mechanical Systems is an academic conference. The conference publishes majorly in the area(s): Resonator & Surface micromachining. Over the lifetime, 6858 publications have been published by the conference receiving 94047 citations.

Laterally driven polysilicon resonant microstructures

Abstract: Interdigitated finger (comb) structures are demonstrated to be effective for electrostatically exciting the resonance of polysilicon microstructures parallel to the plane of the substrate. Linear plates suspended by a folded-cantilever truss and torsional plates suspended by spiral and serpentine springs are fabricated from a 2- mu m-thick phosphorus-doped low-pressure chemical vapor deposited polysilicon film. Resonance is observed visually, with frequencies ranging from 18 kHz to 80 kHz and quality factors from 20 to 130. Simple beam theory is adequate for calculating the resonant frequencies, using a Young's modulus of 140 GPa and neglecting residual strain in the released structures. >

Electrowetting and electrowetting-on-dielectric for microscale liquid handling

Abstract: This paper deals with electrowetting (EW) and electrowetting-on-dielectric (EWOD) principles applied to microfluidic devices. EW and EWOD are principles that can control wettability of liquids on solid surfaces using electric potential. While EW is controlling wettability of a certain electrolyte on a metal electrode by varying electric energy across the electrical double layer (EDL), EWOD applies to virtually any aqueous liquid by varying electric energy across the thin dielectric film between the liquid and conducting substrate. These driving mechanisms have many advantages. By electrically changing the wettability of each of the electrode patterns on a surface, a liquid on these electrodes can be shaped and driven along the active electrodes, making microfluidics extremely simple both for device fabrication and operation. It is also worth noting that, driven by surface tension, the mechanism becomes more effective as the size of the device becomes smaller. This paper describes fundamental concepts and the proof-of-concept experiments, modeling and design, microfabrication processes, and initial testing results for the microfluidic devices based on the EW and EWOD principles.

Re-configurable fluid circuits by PDMS elastomer micromachining

Abstract: We report on a microfabrication technique for realizing re-configurable micro fluidics devices using polymethylsiloxane material (PDMS). The mechanical characteristics of the material, including the Young's modulus and the adhesion energy have been determined experimentally. The magnitude of Young's modulus ranges from 8.7/spl times/10/sup 5/ Pa to 3.6/spl times/10/sup 5/ Pa. The adhesion energy is a function of the PDMS composition as well as chemical treatment. A method for efficiently developing flow interconnects has been demonstrated.

A micromachined comb-drive tuning fork rate gyroscope

Abstract: The development of single-crystal and polysilicon tuning fork gyroscopes of very small size and low cost using microfabrication technology is reported. These tuning fork gyroscopes are extremely rugged, inherently balanced, and easy to fabricate. For a 1-mm gyroscope, projected performance is 10 to 100 degrees /hr for bias stability and for resolution in a 60-Hz bandwidth. To date, 5000 degrees /hr in a 60 Hz bandwidth has been demonstrated. The principle of operation, projected and measured performance and fabrication of silicon, polysilicon, and nickel units and associated electronics and control issues are discussed. >

Microelectromechanical filters for signal processing

Abstract: Microelectromechanical filters based on coupled lateral microresonators are demonstrated. This new class of microelectromechanical systems (MEMS) has potential signal-processing applications for filters which require narrow bandwidth (high Q), good signal-to-noise ratio, and stable temperature and aging characteristics. Microfilters presented in this paper are made by surface-micromachining technologies and tested by using an off-chip modulation technique. The frequency range of these filters is from approximately 5 kHz to on the order of 1 MHz for polysilicon microstructures with suspension beams having a 2-/spl mu/m-square cross section. A series-coupled resonator pair, designed for operation at atmospheric pressure, has a measured center frequency of 18.7 kHz and a pass bandwidth of 1.2 kHz. A planar hermetic sealing process has been developed to enable high quality factors for these mechanical filters and make possible wafer-level vacuum encapsulations. This process uses a low-stress silicon nitride shell for vacuum sealing, and experimental results show that a measured quality factor of 2200 for comb-shape microresonators can be achieved.