Showing papers in "Opto-electronic science in 2022"

Photonic spin Hall effect: fundamentals and emergent applications

Abstract: The photonic spin Hall effect (SHE) refers to the transverse spin separation of photons with opposite spin angular momentum, after the beam passes through an optical interface or inhomogeneous medium, manifested as the spin-depend-ent splitting. It can be considered as an analogue of the SHE in electronic systems: the light’s right-circularly polarized and left-circularly polarized components play the role of the spin-up and spin-down electrons, and the refractive index gradient replaces the electronic potential gradient. Remarkably, the photonic SHE originates from the spin-orbit interaction of the photons and is mainly attributed to two different geometric phases, i.e., the spin-redirection Rytov-Vlasimirskii-Berry in momentum space and the Pancharatnam-Berry phase in Stokes parameter space. The unique properties of the photonic SHE and its powerful ability to manipulate the photon spin, gradually, make it a useful tool in precision metrology, analog optical computing and quantum imaging, etc. In this review, we provide a brief framework to describe the fundamentals and advances of photonic SHE, and give an overview on the emergent applications of this phenomenon in different scenes.

Benchmarking deep learning-based models on nanophotonic inverse design problems

Abstract: Photonic inverse design concerns the problem of finding photonic structures with target optical properties. However, tra-ditional methods based on optimization algorithms are time-consuming and computationally expensive. Recently, deep learning-based approaches have been developed to tackle the problem of inverse design efficiently. Although most of these neural network models have demonstrated high accuracy in different inverse design problems, no previous study has examined the potential effects under given constraints in nanomanufacturing. Additionally, the relative strength of different deep learning-based inverse design approaches has not been fully investigated. Here, we benchmark three commonly used deep learning models in inverse design: Tandem networks, Variational Auto-Encoders, and Generative Adversarial Networks. We provide detailed comparisons in terms of their accuracy, diversity, and robustness. We find that tandem networks and Variational Auto-Encoders give the best accuracy, while Generative Adversarial Networks lead to the most diverse predictions. Our findings could serve as a guideline for researchers to select the model that can best suit their design criteria and fabrication considerations. In addition, our code and data are publicly available, which could be used for future inverse design model development and benchmarking. nanophotonic inverse design problems. Opto-Electron Sci 210012

Terahertz metasurface zone plates with arbitrary polarizations to a fixed polarization conversion

Abstract: Metasurfaces that can realize the polarization manipulation of electromagnetic waves on the sub-wavelength scale have become an emerging research field. Here, a novel strategy of combining the metasurface and Fresnel zone plate to form a metasurface zone plate is proposed to realize the conversion from nearly arbitrary polarizations to a fixed polarization. Specifically, when one polarized wave is incident on adjacent ring zones constructed by different types of meta-atoms, the transmitted waves generated by odd-numbered and even-numbered ring zones converge at the same focus and su-perimpose to generate a fixed polarized wave. As function demonstrations, we have designed two types of metasurface zone plates: one is a focused linear polarizer, and the other can convert nearly arbitrary polarized waves into focused circularly polarized waves. The simulated and measured results are consistent with theoretical expectations, suggesting that the proposed concept is flexible and feasible. Our work provides an alternative platform for polarization manipulation and may vigorously promote the development of polarization photonic devices. Terahertz metasurface zone plates with arbitrary polarizations to a fixed polarization conversion. Opto-Electron Sci 1 , 210014 (2022).

Single-shot mid-infrared incoherent holography using Lucy-Richardson-Rosen algorithm

Abstract: In recent years, there has been a significant transformation in the field of incoherent imaging with new possibilities of compressing three-dimensional (3D) information into a two-dimensional intensity distribution without two-beam interference (TBI). Most of the incoherent 3D imagers without TBI are based on scattering by a random phase mask exhibiting sharp autocorrelation and low cross-correlation along the depth. Consequently, during reconstruction, high lateral and axial resolutions are obtained. Imaging based on scattering requires an astronomical photon budget and is therefore precluded in many power-sensitive applications. In this study, a proof-of-concept 3D imaging method without TBI using deterministic fields has been demonstrated. A new reconstruction method called the Lucy-Richardson-Rosen algorithm has been developed for this imaging concept. We believe that the proposed approach will cause a paradigm-shift in the current state-of-the-art incoherent imaging, fluorescence microscopy, mid-infrared fingerprinting, astronomical imaging, and fast object recognition applications.

Metasurface-based nanoprinting: principle, design and advances

Abstract: Metasurface-based nanoprinting (meta-nanoprinting) has fully demonstrated its advantages in ultrahigh-density grayscale/color image recording and display. A typical meta-nanoprinting device usually has image resolutions reaching 80 k dots per inch (dpi), far exceeding conventional technology such as gravure printing (typ. 5 k dpi). Besides, by fully exploiting the design degrees of freedom of nanostructured metasurfaces, meta-nanoprinting has been developed from previous single-channel to multiple-channels, to current multifunctional integration or even dynamic display. In this review, we overview the development of meta-nanoprinting, including the physics of nanoprinting to manipulate optical amplitude and spectrum, single-functional meta-nanoprinting, multichannel meta-nanoprinting, dynamic meta-nanoprinting and multifunctional metasurface integrating nanoprinting with holography or metalens, etc. Applications of meta-nanoprinting such as image display, vortex beam generation, information decoding and hiding, information encryption, high-density optical storage and optical anti-counterfeiting have also been discussed. Finally, we conclude the opportunities and challenges/perspectives in this rapidly developing research field of meta-nanoprinting.

Linear polarization holography

Abstract: Polarization holography is a newly researched field, that has gained traction with the development of tensor theory. It primarily focuses on the interaction between polarization waves and photosensitive materials. The extraordinary capabilities in modulating the amplitude, phase, and polarization of light have resulted in several new applications, such as holographic storage technology, multichannel polarization multiplexing, vector beams, and optical functional devices. In this paper, fundamental research on polarization holography with linear polarized wave, a component of the theory of polarization holography, has been reviewed. Primarily, the effect of various polarization changes on the linear and nonlinear polarization characteristics of reconstructed wave under continuous exposure and during holographic recording and reconstruction have been focused upon. The polarization modulation realized using these polarization characteristics exhibits unusual functionalities, rendering polarization holography as an attractive research topic in many fields of applications. This paper aims to provide readers with new insights and broaden the application of polarization holography in more scientific and technological research fields.

Multi-cycle reconfigurable THz extraordinary optical transmission using chalcogenide metamaterials

Abstract: Metamaterials composed of metallic antennae arrays are used as they possess extraordinary optical transmission (EOT) in the terahertz (THz) region, whereby a giant forward light propagation can be created using constructive interference of tunneling surface plasmonic waves. However, numerous applications of THz meta-devices demand an active manipula-tion of the THz beam in free space. Although some studies have been carried out to control the EOT for the THz region, few of these are based upon electrical modulation of the EOT phenomenon, and novel strategies are required for actively and dynamically reconfigurable EOT meta-devices. In this work, we experimentally present that the EOT resonance can be coupled to optically reconfigurable chalcogenide metamaterials which offers a reversible all-optical control of the THz light. A modulation efficiency of 88% in transmission at 0.85 THz is experimentally observed using the EOT metamaterials, which is composed of a gold (Au) circular aperture array sitting on a non-volatile chalcogenide phase change material (Ge 2 Sb 2 Te 5 ) film. This comes up with a robust and ultrafast reconfigurable EOT over 20 times of switching, excited by a nanosecond pulsed laser. The measured data have a good agreement with finite-element-method numerical simulation. This work promises THz modulators with significant on/off ratios and fast speeds. extraordinary optical transmission using chalcogenide metamaterials. Opto-Electron Sci 1 , 210010 (2022).

Configurable topological beam splitting via antichiral gyromagnetic photonic crystal

Abstract: Antichiral gyromagnetic photonic crystal (GPC) in a honeycomb lattice with the two interpenetrating triangular sublattices A and B magnetically biased in opposite directions can realize antichiral one-way edge states propagating along the same direction at its two parallel edges. Here, we report the construction and observation of topological beam splitting with the easily adjustable right-to-left ratio in an antichiral GPC. The splitter is compact and configurable, has high transmission efficiency, and allows for multi-channel utilization, crosstalk-proof, and robust against defects and obstacles. This magnificent performance is attributed to the peculiar property that antichiral one-way edge states exist only at zigzag edge but not at armchair edge of antichiral GPC. When we combine two rectangular antichiral GPCs holding left- and right-propagating antichiral one-way edge states respectively, bidirectionally radiating one-way edge states at two parallel zigzag edges can be achieved. Our observations can enrich the understanding of fundamental physics and expand topological photonic applications.

Femtosecond laser-induced periodic structures: mechanisms, techniques, and applications

Abstract: Over the past two decades, femtosecond laser-induced periodic structures (femtosecond-LIPSs) have become ubiquitous in a variety of materials, including metals, semiconductors, dielectrics, and polymers. Femtosecond-LIPSs have become a useful laser processing method, with broad prospects in adjusting material properties such as structural color, data storage, light absorption, and luminescence. This review discusses the formation mechanism of LIPSs, specifically the LIPS formation processes based on the pump-probe imaging method. The pulse shaping of a femtosecond laser in terms of the time/frequency, polarization, and spatial distribution is an efficient method for fabricating high-quality LIPSs. Various LIPS applications are also briefly introduced. The last part of this paper discusses the LIPS formation mechanism, as well as the high-efficiency and high-quality processing of LIPSs using shaped ultrafast lasers and their applications. Sci 1 , 220005

Optical near-field imaging and nanostructuring by means of laser ablation

Abstract: In this review we consider the development of optical near-field imaging and nanostructuring by means of laser ablation since its early stages around the turn of the century. The interaction of short, intense laser pulses with nanoparticles on a surface leads to laterally tightly confined, strongly enhanced electromagnetic fields below and around the nano-objects, which can easily give rise to nanoablation. This effect can be exploited for structuring substrate surfaces on a length scale well below the diffraction limit, one to two orders smaller than the incident laser wavelength. We report on structure formation by the optical near field of both dielectric and metallic nano-objects, the latter allowing even stronger and more localized enhancement of the electromagnetic field due to the excitation of plasmon modes. Structuring with this method enables one to nanopattern large areas in a one-step parallel process with just one laser pulse irradiation, and in the course of time various improvements have been added to this technique, so that also more complex and even arbitrary structures can be produced by means of nanoablation. The near-field patterns generated on the surface can be read out with high resolution techniques like scanning electron microscopy and atomic force microscopy and provide thus a valu-able tool—in conjunction with numerical calculations like finite difference time domain (FDTD) simulations—for a deeper understanding of the optical and plasmonic properties of nanostructures and their applications.

100 Hertz frame-rate switching three-dimensional orbital angular momentum multiplexing holography via cross convolution

Abstract: The orbital angular momentum (OAM) of light has been implemented as an information carrier in OAM holography. Holographic information can be multiplexed in theoretical unbounded OAM channels, promoting the applications of optically addressable dynamic display and high-security optical encryption. However, the frame-rate of the dynamic extraction of the information reconstruction process in OAM holography is physically determined by the switching speed of the incident OAM states, which is currently below 30 Hz limited by refreshing rate of the phase-modulation spatial light modulator (SLM). Here, based on a cross convolution with the spatial frequency of the OAM-multiplexing hologram, the spatial frequencies of an elaborately-designed amplitude distribution, namely amplitude decoding key, has been adopted for the extraction of three-dimensional holographic information encoded in a specific OAM information channel. We experimentally demonstrated a dynamic extraction frame rate of 100 Hz from an OAM multiplexing hologram with 10 information channels indicated by individual OAM values from –50 to 50. The new concept of cross convolution theorem can even provide the potential of parallel reproduction and distribution of information encoded in many OAM channels at various positions which boosts the capacity of information processing far beyond the traditional decoding methods. Thus, our results provide a holographic paradigm for high-speed 3D information processing, paving an unprecedented way to achieve the high-capacity short-range optical communication system.

Terahertz generation from laser-induced plasma

Abstract: Interest of the research in terahertz (THz) wave has been strongly motivated by its wide applications in the fields of physics, chemistry, biology, and engineering. Developing efficient and reliable THz source is of uttermost priority in these re-searches. Numerous attempts have been made in fulfilling the THz generation. Greatly benefited from the progress of the ultrafast pulses, the laser-induced-plasma is one of the auspicious tools to provide desirable THz waves, owing to its su-periorities in high power threshold, intense THz signal, and ultrawide THz spectrum. This paper reviews the physics and progress of the THz generation from the laser-induced plasmas, which are produced by gas, liquid, and solid. The characteristics of the emitted THz waves are also included. There are many complicated physical processes involved in the interactions of laser-plasma, making various laser-plasma scenarios in the THz generations. In view of this, we will only focus on the THz generation classified by physical mechanisms. Finally, we discuss a perspective on the future of THz generation from the laser-induced plasma, as well as its involved challenges.

Photonic lenses with whispering gallery waves at Janus particles

Abstract: We show that electric field on the plane surface of truncated sphere or cylinders (so called Janus particles) have sharp resonances versus the depth of removed segment of a sphere or cylinder. These resonances are related to the excited whispering gallery waves caused by truncation. It is a new mechanism of the field localization. Optimization of this effect for cylinders permits to reach a super resolution in the line thickness, which can be used for contact optical lithography.

All-optical logic gate computing for high-speed parallel information processing

Abstract: Optical computing and optical neural network have gained increasing attention in recent years because of their potential advantages of parallel processing at the speed of light and low power consumption by comparison with electronic computing. The optical implementation of the fundamental building blocks of a digital computer, i.e. logic gates, has been investigated extensively in the past few decades. Optical logic gate computing is an alternative approach to various analogue optical computing architectures. In this paper, the latest development of optical logic gate computing with different kinds of implementations is reviewed. Firstly, the basic concepts of analogue and digital computing with logic gates in the electronic and optical domains are introduced. And then a comprehensive summary of various optical logic gate schemes including spatial encoding of light field, semiconductor optical amplifiers (SOA), highly nonlinear fiber (HNLF), microscale and nanoscale waveguides, and photonic crystal structures is presented. To conclude, the formidable challenges in developing practical all-optical logic gates are analyzed and the prospects of the future are discussed. al. All-optical logic gate computing for high-speed parallel information processing. Opto-Electron Sci 1 , 220010 (2022).

Perovskite-transition metal dichalcogenides heterostructures: recent advances and future perspectives

Abstract: Transition metal dichalcogenides (TMDs) and perovskites are among the most attractive and widely investigated semiconductors in the recent decade. They are promising materials for various applications, such as photodetection, solar energy harvesting, light emission, and many others. Combining these materials to form heterostructures can enrich the already fascinating properties and bring up new phenomena and opportunities. Work in this field is growing rapidly in both fundamental studies and device applications. Here, we review the recent findings in the perovskite-TMD heterostructures and give our perspectives on the future development of this promising field. The fundamental properties of the perovskites, TMDs, and their heterostructures are discussed first, followed by a summary of the synthesis methods of the perovskites and TMDs and the approaches to obtain high-quality interfaces. Particular attention is paid to the TMD-perovskite heterostructures that have been applied in solar cells and photodetectors with notable performance improvement. Finally through our analysis, we propose an outline on further fundamental studies and the promising applications of perovskite-TMD heterostructures.

Directional high-efficiency nanowire LEDs with reduced angular color shift for AR and VR displays

Abstract: The emission wavelength of InGaN/GaN dot-in-wire LED can be tuned by modifying the nanowire diameter, but it causes mismatched angular distributions between blue, green, and red nanowires because of the excitation of different waveguide modes. Besides, the far-field radiation patterns and light extraction efficiency are typically calculated by center dipoles, which fails to provide accurate results. To address these issues, we first compare the simulation results between central dipole and dipole cloud with experimental data. Next, we calculate and analyze the display metrics for full-color nanowire LEDs by 3D dipole cloud. Finally, we achieve unnoticeable angular color shift within ±20° viewing cone for augmented reality (AR) and virtual reality (VR) displays with an improved light extraction efficiency.

Towards integrated mode-division demultiplexing spectrometer by deep learning

Abstract: Miniaturized spectrometers have been widely researched in recent years, but few studies are conducted with on-chip multimode schemes for mode-division multiplexing (MDM) systems. Here we propose an ultracompact mode-division demultiplexing spectrometer that includes branched waveguide structures and graphene-based photodetectors, which realizes simultaneously spectral dispersing and light fields detecting. In the bandwidth of 1500–1600 nm, the designed spectrometer achieves the single-mode spectral resolution of 7 nm for each mode of TE₁–TE₄ by Tikhonov regularization optimization. Empowered by deep learning algorithms, the 15-nm resolution of parallel reconstruction for TE₁–TE₄ is achieved by a single-shot measurement. Moreover, by stacking the multimode response in TE₁–TE₄ to the single spectra, the 3-nm spectral resolution is realized. This design reveals an effective solution for on-chip MDM spectroscopy, and may find applications in multimode sensing, interconnecting and processing.

High-speed visible light communication based on micro-LED: A technology with wide applications in next generation communication

Abstract: The evolution of next-generation cellular networks is aimed at creating faster, more reliable solutions. Both the next-generation 6G network and the metaverse require high transmission speeds. Visible light communication (VLC) is deemed an important ancillary technology to wireless communication. It has shown potential for a wide range of applications in next-generation communication. Micro light-emitting diodes (μLEDs) are ideal light sources for high-speed VLC, owing to their high modulation bandwidths. In this review, an overview of μLEDs for VLC is presented. Methods to improve the modulation bandwidth are discussed in terms of epitaxy optimization, crystal orientation, and active region structure. Moreover, electroluminescent white LEDs, photoluminescent white LEDs based on phosphor or quantum-dot color conversion, and μLED-based detectors for VLC are introduced. Finally, the latest high-speed VLC applications and the application prospects of VLC in 6G are introduced, including underwater VLC and artificial intelligence-based VLC systems.

Giant and light modifiable third-order optical nonlinearity in a free-standing h-BN film

Abstract: Recently, hexagonal boron nitride (h-BN) has become a promising nanophotonic platform for on-chip information devices due to the practicability in generating optically stable, ultra-bright quantum emitters. For an integrated information-pro-cessing chip, high optical nonlinearity is indispensable for various fundamental functionalities, such as all-optical modulation, high order harmonic generation, optical switching and so on. Here we study the third-order optical nonlinearity of free-standing h-BN thin films, which is an ideal platform for on-chip integration and device formation without the need of transfer. The films were synthesized by a solution-based method with abundant functional groups enabling high third-or-der optical nonlinearity. Unlike the highly inert pristine h-BN films synthesized by conventional methods, the free-stand-ing h-BN films could be locally oxidized upon tailored femtosecond laser irradiation, which further enhances the third-or-der nonlinearity, especially the nonlinear refraction index, by more than 20 times. The combination of the free-standing hBN films with laser activation and patterning capability establishes a new promising platform for high performance on-chip photonic devices with modifiable optical performance. a free-standing h-BN Opto-Electron Sci 1 , 210013

Applications of optically and electrically driven nanoscale bowtie antennas

Abstract: Optical antennas play an important role in optical field manipulation. Among them, nanoscale bowtie antennas have been extensively studied for its high confinement and enhancement. In this mini-review, we start with a brief introduction of bowtie antennas and underlying physics. Then we review the applications with respect to optically and electrically excited nanoscale bowtie antennas. Optically driven bowtie antennas enable a set of optical applications such as near-field imaging/trapping, nonlinear response, nanolithography, photon generation and detection. Finally, we put emphasis on the principle and applications of electrically driven bowtie antennas, an emerging method of generating ultrafast and broadband tunable nanosources. In a word, nanoscale bowtie antennas still have great potential research value to explore.

Charge carrier dynamics in different crystal phases of CH3NH3PbI3 perovskite

Abstract: Despite that organic-inorganic lead halide perovskites have attracted enormous scientific attention for energy conversion applications over the recent years, the influence of temperature and the type of the employed hole transport layer (HTL) on the charge carrier dynamics and recombination processes in perovskite photovoltaic devices is still largely unexplored. In particular, significant knowledge is missing on how these crucial parameters for radiative and non-radiative re-combinations, as well as for efficient charge extraction vary among different perovskite crystalline phases that are induced by temperature variation. Herein, we perform micro photoluminescence (μPL) and ultrafast time resolved transient absorption spectroscopy (TAS) in Glass/Perovskite and two different Glass/ITO/HTL/Perovskite configurations at temperatures below room temperature, in order to probe the charge carrier dynamics of different perovskite crystalline phases, while considering also the effect of the employed HTL polymer. Namely, CH 3 NH 3 PbI 3 films were deposited on Glass, PEDOT:PSS and PTAA polymers, and the developed Glass/CH 3 NH 3 PbI 3 and Glass/ITO/HTL/CH 3 NH 3 PbI 3 architectures were studied from 85 K up to 215 K in order to explore the charge extraction dynamics of the CH 3 NH 3 PbI 3 orthorhombic and tetragonal crystalline phases. It is observed an unusual blueshift of the bandgap with temperature and the dual emission at temperature below of 100 K and also, that the charge carrier dynamics, as expressed by hole injection times and free carrier recombination rates, are strongly depended on the actual pervoskite crystal phase, as well as, from the selected hole transport material. al. Charge carrier dynamics in different crystal of CH

Photo-processing of perovskites: current research status and challenges

Abstract: Photo-processing has been established as a powerful technique for the synthesis and structure modification of perovskites. In this review, the authors discuss the mechanisms of photo-processing of perovskites and summarize the recent progress in the photo-processing of perovskites for synthesis, patterning, ion exchange, phase transition, assembly, and ion migration and redistribution. The applications of photo-processed perovskites in photovoltaic devices, lasers, photodetectors, light-emitting diodes (LEDs)

Spatio-temporal isolator in lithium niobate on insulator

Abstract: In this contribution, we simulate, design, and experimentally demonstrate an integrated optical isolator based on spatiotemporal modulation in the thin-film lithium niobate on insulator waveguide platform. We used two cascaded travelling wave phase modulators for spatiotemporal modulation and a ring resonator as a wavelength filter to suppress the sidebands of the reverse propagating light. This enabled us to achieve an isolation of 27 dB. The demonstrated suppression of the reverse propagating light makes such isolators suitable for the integration with III-V laser diodes and Erbium doped gain sections in the thin-film lithium niobate on insulator waveguide platform.

Journal launch: Welcome Opto-Electronic Science

Abstract: Optics is an ancient and vibrant subject with a rich history of thousands of years. Since Maxwell discovered that light is an electromagnetic wave, optics has always been accompanied by electricity. Optics and opto-electronics play a vital role in many key fields related to the development and progress of mankind, such as energy, information, internet, astronomy, and medicine, etc. Many large-scale scientific projects, ranging from laser nuclear fusion to gravitational wave detection, from large-aperture telescopes to lithography equipment, are mainly based on opto-electronic science.
In the history of scientific development, the opto-electronic discipline is also extremely important. A large number of Nobel Prize winning works on Theory of relativity, Quantum theory, Lasers, Laser cooling, Light-emitting diodes, and Topological phase transitions, are deeply rooted in opto-electronic science. Nowadays, there are still many unaddressed issues in the field of opto-electronic science, in particular the optical diffraction limit, the coupling of photons and electrons, new opto-electronic materials, and the analogy between topological electron and topological photon related effects, which require our in-depth investigations. New breakthroughs, new paradigms and new horizons in fundamental research are therefore needed.
To promote discussions among scientific community and interdisciplinary collaboration, here we announce the launch of a new journal, Opto-Electronic Science, to display the emerging groundbreaking research focused on opto-electronics, and to encourage researchers to discover more the nature of science.
Opto-Electronic Science (OES) is founded and sponsored by the Institute of Optics and Electronics (IOE), Chinese Academy of Sciences (CAS), which is a crucial research institute in the field of opto-electronics in China, with a glorious history of over 50 years. OES is an open-access journal to promptly publish peer-reviewed Articles, Letters, Reviews, and Editorials, etc. This new journal will focus more on theoretical and fundamental innovations covering the broad area of optics, photonics and opto-electronics. Selected as a China’s high-profile new journal, it is supported by China Association for Science and Technology (CAST).
We are very honored in assembling an outstanding editorial board of world-leading scientists who are actively engaged in the research community. They are dedicated to select effective professional reviewers and manage the high-standard peer-reviewing processes of the manuscripts with their expertise and insight. OES has firm supports from the excellent editorial team of its sister journal Opto-Electronic Advances (OEA).
We are looking forward, with the most excellent contributions from the community, to making Opto-Electronic Science an outstanding platform for exhibiting the finest fundamental innovations in opto-electronics and related disciplines. We also hope that it will bring new inspirations for researchers and usher them into the exciting and bright future of opto-electronics science.

Large-scale and high-quality III-nitride membranes through microcavity-assisted crack propagation by engineering tensile-stressed Ni layers

Abstract: Epitaxially grown III-nitride alloys are tightly bonded materials with mixed covalent-ionic bonds. This tight bonding presents tremendous challenges in developing III-nitride membranes, even though semiconductor membranes can provide numerous advantages by removing thick, inflexible, and costly substrates. Herein, cavities with various sizes were introduced by overgrowing target layers, such as undoped GaN and green LEDs, on nanoporous templates prepared by electrochemical etching of n-type GaN. The large primary interfacial toughness was effectively reduced according to the design of the cavity density, and the overgrown target layers were then conveniently exfoliated by engineering tensile-stressed Ni layers. The resulting III-nitride membranes maintained high crystal quality even after exfoliation due to the use of GaN-based nanoporous templates with the same lattice constant. The microcavity-assisted crack propagation process developed for the current III-nitride membranes forms a universal process for developing various kinds of large-scale and high-quality semiconductor membranes.