Journal ArticleDOI
An ultra-precision XY/spl theta//sub Z/ piezo-micropositioner. I. Design and analysis
TLDR
A novel three degree-of-freedom micropositioner was developed for deep ultraviolet lithography applications and aims at high resolution, high stiffness, and extremely low crosstalk interference.Abstract:
A novel three degree-of-freedom micropositioner was developed for deep ultraviolet lithography applications. The design of the micropositioner utilizes the monolithic flexural mechanism with built-in multilayer piezoelectric actuators and sensors to achieve translations in the X- and Y-axes and rotation in the /spl theta//sub Z/-axis. The compact design aims at high resolution, high stiffness, and extremely low crosstalk interference. Parametric analyses of harmonic and forced vibrations are conducted to solve the derived dynamic models for the near optimum geometry of the micropositioner. Furthermore, the error budget analysis is conducted to minimize the effects of the geometric tolerance, material variation, and hysteresis errors.read more
Citations
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Journal ArticleDOI
Design analysis, fabrication and testing of a parallel-kinematic micropositioning XY stage
TL;DR: In this article, a piezo-driven, parallel-kinematic, micropositioning XY stage is presented, which consists of parallelogram four-bar linkages, flexure hinges, and piezoelectric actuators.
Proceedings ArticleDOI
Design and experiment of a 3 DOF parallel micro-mechanism utilizing flexure hinges
TL;DR: It is emphasized that the precise modeling of a flexure hinge is significant to guarantee the positional accuracy of parallel micromechanisms using Flexure hinge.
Journal ArticleDOI
Constraint-based design of parallel kinematic XY flexure mechanisms
Shorya Awtar,Alexander H. Slocum +1 more
TL;DR: In this article, a parallel kinematic XY flexure mechanism design based on systematic constraint patterns that allow large ranges of motion without causing over-constraint or significant error motions is presented.
Journal ArticleDOI
Stiffness modeling of flexure parallel mechanism
Huy-Hoang Pham,I-Ming Chen +1 more
TL;DR: In this article, a stiffness model based on the way the flexure members are connected together in serial or parallel combinations is proposed to formulate the functional relationship between stiffness and dimensions as well as the free shape of the FPM.
Journal ArticleDOI
Enhanced sliding mode motion tracking control of piezoelectric actuators
TL;DR: In this article, an enhanced sliding mode motion tracking control methodology for piezoelectric actuators to track desired motion trajectories is proposed, which is based on the variable structure control approach.
References
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Book
Precision Machine Design
TL;DR: This book is a comprehensive engineering exploration of all the aspects of precision machine design - both component and system design considerations for precision machines providing many real-world design case studies as well as numerous examples of existing components and their characteristics.
Journal ArticleDOI
Dynamic piezoelectric translation devices
TL;DR: In this article, the principle of inertial sliding of a platform on a periodically accelerated support is exploited for the design of a piezoelectric finepositioning device, which provides step sizes of 0.04-0.2 μ, speeds of up to 0.2 mm/s, and practically unlimited translation range.
Journal ArticleDOI
An ultraprecision stage for alignment of wafers in advanced microlithography
Chang-Woo Lee,Seung-Woo Kim +1 more
TL;DR: In this paper, an ultraprecision stage is designed to align wafers for the microlithography of integrated circuit patterns of sub-0.3 μm design rules.
Journal ArticleDOI
Piezodriven 50‐μm range stage with subnanometer resolution
Fredric Scire,E. Clayton Teague +1 more
TL;DR: A micropositioning stage was developed for use with optical and electron microscopes in the accurate measurement of fine lines used by the microelectronics industry and microscopic objects such as biological cells, air pollution particles, and asbestos fibers.
Patent
Piezoelectric electromechanical translation apparatus
TL;DR: In this article, the load actuating shaft of an inchworm translating device is extended through a housing and is programmably movable over long distances with extremely fine resolution, in extremely small incremental steps by a piezoelectric driver.