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Patent

Apparatus and method for pressure fluctuation insensitive mass flow control

TLDR
A mass flow controller includes a thermal mass flow sensor in combination with a pressure sensor to provide a mass flow control valve that is relatively insensitive to fluctuations in input pressure as discussed by the authors, where the measured pressure is used to compensate the measured inlet flow rate and to produce a compensated measure of the outlet flow rate.
Abstract
A mass flow controller includes a thermal mass flow sensor in combination with a pressure sensor to provide a mass flow controller that is relatively insensitive to fluctuations in input pressure. The pressure sensor and thermal sensor respectively provide signals to an electronic controller indicating the measured inlet flow rate and the pressure within the dead volume. The electronic controller employs the measured pressure to compensate the measured inlet flow rate and to thereby produce a compensated measure of the outlet flow rate, which may be used to operate a mass flow controller control valve.

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Citations
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Patent

Methods and apparatus for pressure compensation in a mass flow controller

TL;DR: In this article, a method and system for compensating for pressure transients in the pressure environment of a flow path and mass flow controller is presented, and a system and method for reducing or eliminating performance degradations, instabilities, and/or inaccuracies of mass flow controllers caused by changes in the environment.
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System and method for in-situ flow verification and calibration

TL;DR: In this article, a system and method for in-situ verification and calibration of flow control devices includes a first network physical layer connecting the flow control device to a flow verification device.
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TL;DR: In this paper, a method of obtaining at least one representation of a characteristic function of a sensor from a test fluid during calibration of the sensor according to a sensor model has been proposed.
References
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