Journal ArticleDOI
Crossed aperture lenses for the correction of chromatic and aperture aberrations
TLDR
In this article, the chromatic and aperture aberrations of crossed five-aperture lenses are analyzed by direct ray tracing, and it is shown that the first-order properties of the crossed lens are similar to those of a quadrupole doublet.Abstract:
The chromatic and aperture aberrations of crossed five‐aperture lenses are analyzed by direct ray tracing. The apertures are rectangular and the voltages are applied in such a way that the first‐order properties of the crossed lens are similar to those of a quadrupole doublet. It is shown that in astigmatic modes the chromatic and aperture aberrations of one of the linear images can be simultaneously eliminated or made negative. It is also shown that stigmatic modes exist in which the magnification is different in two perpendicular planes and in which the image blurring caused by the chromatic and aperture aberrations in the direction of smaller magnification is ten times smaller than that given by a round lens of the same focal length and the blurring in the other direction is at least two times smaller. The stigmatic crossed lens also gives a larger working distance than the equivalent round lens. The crossed lens will therefore be preferable for many probe forming systems.read more
Citations
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Journal ArticleDOI
Minimisation of the aberrations of electrostatic lens systems composed of quadrupole and octupole lenses
L.A. Baranova,F.H. Read +1 more
TL;DR: In this paper, the authors compared the performance of two types of multiplets based on electrostatic quadrupole and octupole lenses: the mid-acceleration and the octupoles.
Journal ArticleDOI
Computational simulation of an electrostatic aberration corrector for a low-voltage scanning electron microscope
TL;DR: In this article, the design of electrostatic aberration correctors for lowvoltage scanning electron microscopes is considered, where the authors optimize the geometry and scale size of the lenses so that the fields at the surfaces of the electrodes do not exceed the breakdown value.
Journal ArticleDOI
An extraction system for low-energy hydrogen ions formed by electron impact
TL;DR: In this paper, a system was developed for extracting near-zero kinetic energy H− and D− ions formed by dissociative electron attachment, which is the essential part of a new set-up for vibrational spectroscopy of hydrogen molecules.
Journal ArticleDOI
Geometrically Modified Einzel Lenses, From the Conventional Cylindrical Einzel Lens to Cubic and Continuous Einzel Lens
TL;DR: In this article, cubic and continuous body electrostatic (CBE) lenses are compared in terms of different aberrations and input beam properties, and relative sensitivity is proposed as a figure of merit, based on which the focusing characteristics of the two new lenses were compared with that of a conventional Einzel, and a quadrupole lenses of the same size.
Journal ArticleDOI
In multi electron beam systems, "Neighbours Matter".
TL;DR: In this paper , a correction scheme is proposed in which applies a slightly non-round profile to the aperture lenses to counterbalance the fourfold astigmatism caused by the electrostatic interaction of neighbouring apertures with each aperture's lens field.
References
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Journal ArticleDOI
Aberration correction in a low voltage SEM by a multipole corrector
J. Zach,Maximilian Haider +1 more
TL;DR: In this article, a high resolution SEM with a quadrupole/octupole corrector for the correction of spherical and chromatic aberration was set up for low beam energies.
Journal ArticleDOI
Time-dependent perturbation formalism for calculating the aberrations of systems with large ray gradients
Harald Rose,D. Preikszas +1 more
TL;DR: In this paper, a time-dependent perturbation formalism is proposed to calculate axial aberrations for systems with large gradients of the particle trajectories in a consistent way, where the position of a particle is referred to that of an axial reference particle making the axial coordinate a small quantity.
Book ChapterDOI
The Optics of Round and Multipole Electrostatic Lenses
L. A. Baranova,S.Ya. Yavor +1 more
TL;DR: In this paper, the authors present the current state of the theory of electrostatic lenses and their application in the field of field calculation, focusing, and aberrations, and two types of lenses, transaxial and crossed ones, are discussed.
Journal ArticleDOI
A new type of quadrupole correction lens for electron-beam lithography
TL;DR: In this article, a self-aligned quadrupole correction lens with lower aperture aberration coefficients was developed for an electron-beam lithography system, which consists of three-stage electrostatic quadrupoles, and aperture electrodes placed between quadrapoles.