Journal ArticleDOI
Dynamic thermal sensor - principles in MEMS for fluid characterization
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TLDR
In this article, a micromachined sensor was developed for the measurement of transient thermal signal responses leading to the thermal characterization of fluids at low sample volumes using thin-film technology with its characteristic low masses and high aspect ratios.Abstract:
Using thin-film technology with its characteristic low masses and high aspect ratios a new range of possibilities is made available for the use of dynamic thermal measuring principles. Based on this, a micromachined sensor was developed for the measurement of transient thermal signal responses leading to the thermal characterization of fluids at low sample volumes. The achieved resolution allowed the measurement of thermal parameters of the investigated fluids, i.e., thermal conductivity and specific heat, inside microfluidic systems at a high sensitivity, enabling the detection of inter-fluid boundaries, e.g., as found in micromixers and -reactors, making the sensor a useful tool for micro fluidic system characterization. This is achieved via the measurement of the frequency dependent thermal signal response.read more
Citations
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Journal ArticleDOI
Dynamic thermal sensor for biofilm monitoring
TL;DR: In this article, a sensor consisting of a small heater and a temperature probe (thermistor) is used to monitor the evolution of biofilms for large time frames (hours) and also features very stable baseline measurements that outperform other types of sensor systems.
Proceedings ArticleDOI
Simulation and fabrication of a 2D-flow sensor for thermal characterization of fluids and for flow speed measurements
A.S. Cubukcu,Gerald Urban +1 more
TL;DR: In this article, an enhanced flow sensor is developed at IMTEK to enable simultaneous measurement of thermal properties of a fluid and its flow velocity, which is necessary to measure flow rates accurately by thermal means in cases where fluid properties fluctuate in time.
Journal ArticleDOI
Simulation and fabrication of a 2D-flow sensor for simultaneous fluid characterization
A.S. Cubukcu,Gerald Urban +1 more
TL;DR: In this article, an enhanced flow sensor is developed at IMTEK to enable simultaneous fluid characterization and flow velocity measurement, which is necessary to measure flow rates accurately by thermal means in cases where fluid properties fluctuate in time.
Journal ArticleDOI
Temperature Sensing in Modular Microfluidic Architectures
TL;DR: A discrete microfluidic element with integrated thermal sensor was fabricated and demonstrated as an effective probe for process monitoring and prototyping and potentially enables complex, three-dimensional microfluidity architectures with real-time temperature feedback and flow rate sensing, without application specificity or restriction to planar channel routing formats.
Journal ArticleDOI
Micro-beam sensor for detection of thermal conductivity of gases and liquids
TL;DR: In this article, a prototype of a micro-beam MEMS sensor that is made of a thin metallic film suspended across a trench on a silicon substrate was fabricated for examination of the feasibility of detecting thermal conductivity of gases and liquids.
References
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Book
CRC Handbook of Chemistry and Physics
TL;DR: CRC handbook of chemistry and physics, CRC Handbook of Chemistry and Physics, CRC handbook as discussed by the authors, CRC Handbook for Chemistry and Physiology, CRC Handbook for Physics,
Journal ArticleDOI
Process-dependent thin-film thermal conductivities for thermal CMOS MEMS
TL;DR: In this article, the thermal conductivities of dielectric and conducting thin films of three commercial CMOS processes were determined in the temperature range from 120 to 400 K. The measurements were performed using micromachined heatable test structures containing the layers to be characterized.
Process-Dependent Thin-Film Thermal Conductivities for Thermal
Martin von Arx,O. Paul,H. Baltes +2 more
TL;DR: In this paper, the thermal conductivities of dielectric and conducting thin films of three commercial CMOS processes were determined in the temperature range from 120 to 400 K. The measurements were performed using micromachined heatable test structures containing the layers to be characterized.
Proceedings ArticleDOI
Micromachined accelerometer based on convection heat transfer
TL;DR: In this article, a micromachined thermal accelerometer based on the free-convection heat transfer of a small hot air bubble in a sealed chamber has been developed at Simon Fraser University.
Journal ArticleDOI
Wide range semiconductor flow sensors
TL;DR: In this article, an air flow measuring range from 0.6 ml/h to at least 150 l/h has been achieved, e.g. with a rectangular flow channel of 0.54 mm 2 cross-sectional area.