Open Access
Effect of the processing and transport parameters on mold filling in roll-to-roll nanoimprint lithography
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The article was published on 2019-06-01 and is currently open access. It has received 2 citations till now. The article focuses on the topics: Nanoimprint lithography & Roll-to-roll processing.read more
Citations
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Journal ArticleDOI
A thermomechanical and photochemical description of the phase change process in roll-to-roll nanoimprinting lithography
TL;DR: In this article, a model for phase change process due to irradiation with an Ultraviolet (UV) light in a mold filled with a viscoelastic fluid in roll-to-roll nanoimprinting lithography is developed.
Journal ArticleDOI
A thermomechanical description of the mold filling process in roll-to-roll nanoimprinting lithography
TL;DR: In this paper, the constitutive equations for a viscoelastic fluid undergoing a continuous mold filling process at the nanoscale within the context of a thermomechanical framework were derived by substituting the constituent equations into the appropriate balance laws.
References
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Journal ArticleDOI
Numerical Calculation of Time‐Dependent Viscous Incompressible Flow of Fluid with Free Surface
Francis H. Harlow,J. Eddie Welch +1 more
TL;DR: In this paper, a new technique is described for the numerical investigation of the time-dependent flow of an incompressible fluid, the boundary of which is partially confined and partially free The full Navier-Stokes equations are written in finite-difference form, and the solution is accomplished by finite-time step advancement.
Book
Rheology: Principles, Measurements, and Applications
TL;DR: This text tackles the tensor in such a way as to make the problems accessible and understandable - by simplifying notation and making the three-dimensional approach to rheology practical.
Journal ArticleDOI
Large-area roll-to-roll and roll-to-plate nanoimprint lithography: a step toward high-throughput application of continuous nanoimprinting.
Se Hyun Ahn,L. Jay Guo +1 more
TL;DR: The film thickness after the imprinting process, which is critical in optical applications, as a function of several imprinting parameters such as roller pressure and speed, is thoroughly investigated, and an analytical model has been developed to predict the residual layer thickness in dynamic R2RNIL process.
Journal ArticleDOI
Sub-15 nm linewidth gratings using roll-to-roll nanoimprinting and plasma trimming to fabricate flexible wire-grid polarizers with low colour shift.
TL;DR: Sub-15 nm-wide gratings with a high aspect ratio of up to 16:1 were fabricated using roll-to-roll nanoimprinting and plasma trimming to achieve high optical performance and low colour shift and flexible wire-grid polarizers for display applications.
Proceedings ArticleDOI
High volume nanoscale roll-based imprinting using jet and flash imprint lithography
Se Hyun Ahn,Michael I. Miller,Shuqiang Yang,Mahadevan GanapathiSubramanian,Marlon Menezes,Vik Singh,Fen Wan,Jin Choi,Frank Y. Xu,Dwayne L. LaBrake,Douglas J. Resnick,Paul Hofemann,Sidlgata V. Sreenivasan +12 more
TL;DR: In this article, a roll-based J-FIL process is applied to fabricate large-area flexible bilayer wire-grid polarizers (WGPs) and high-performance WGPs on rigid glass substrates.
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High-speed roll-to-roll nanoimprint lithography on flexible substrate and mold-separation analysis
Se Hyun Ahn,L. Jay Guo +1 more