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Patent

Electrostatic bimorph actuator

TLDR
In this article, an electrostatic bimorph actuator is described for a microelectrical mechanical optical display system, where the actuator includes a substrate electrode that is secured to and insulated from the substrate and positioned under and in alignment with the bimomorph arm.
Abstract
An electrostatic bimorph actuator includes a cantilevered flexible bimorph arm that is secured and insulated at one end to a planar substrate. In an electrostatically activated state the bimorph arm is generally parallel to the planar substrate. In a relaxed state, residual stress in the bimorph arm causes its free end to extend out-of-plane from the planar substrate. The actuator includes a substrate electrode that is secured to and insulated from the substrate and positioned under and in alignment with the bimorph arm. An electrical potential difference applied between the bimorph arm and the substrate electrode imparts electrostatic attraction between the bimorph arm and the substrate electrode to activate the actuator. As an exemplary application in which such actuators could be used, a microelectrical mechanical optical display system is described.

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Citations
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References
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Patent

Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements

TL;DR: In this article, a spatial light modulator includes an upper optically transmissive substrate held above a lower substrate containing addressing circuitry, where one or more electrostatically deflectable elements are suspended by hinges from the upper substrate.
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TL;DR: In this paper, a thermal ablation of the endometrium of a uterus is performed using a catheter with at least one lumen and a thermally conductive inflatable member coupled to the distal end of the catheter.
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TL;DR: In this article, an apparatus and method for the treatment of conditions in which it is desired to simultaneously hyperthermally treat diseased target tissue in a patient and dilate a lumen of a patient which is compressed and/or obstructed by the diseased targets or surrounding tissue is disclosed.
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Spatial light modulator

TL;DR: In this article, a spatial light modulator is presented where a moveable electrode is disposed opposite a fixed electrode and is biased to roll in a preferred direction upon application of an electric field across the electrodes to produce a light valve or light shutter.
Journal ArticleDOI

Process for in-plane and out-of-plane single-crystal-silicon thermal microactuators

TL;DR: In this article, a process to manufacture single-crystal thermal actuators using silicon fusion bonding and electrochemical etch stop is presented, which permits simultaneous creation of in-plane and out-of-plane thermal actuator together with levers suitable for both directions of actuation.