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Forming memory transistors with varying gate oxide thicknesses

TLDR
A semiconductor integrated circuit device and a method of manufacturing the same, wherein an MIS type memory transistor of a two-layered gate electrode structure is formed on the surface of a semiconductor substrate, and an MIS-type transistor for a low voltage having a comparatively thin gate oxide film and a MIS type transistor for high voltage with a comparatively thick gate oxide films are formed around the memory transistor.
Abstract
A semiconductor integrated circuit device and a method of manufacturing the same, wherein an MIS type memory transistor of a two-layered gate electrode structure is formed on the surface of a semiconductor substrate, and an MIS type transistor for a low voltage having a comparatively thin gate oxide film and an MIS type transistor for a high voltage having a comparatively thick gate oxide film are formed around the memory transistor.

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Citations
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TL;DR: In this article, gate oxides having different thicknesses are grown on a semiconductor layer by the process which comprises growing a semiconducting layer on a substrate, growing an oxide layer on the semiconducted layer, exposing a selected area of the oxide layer, amorphizing the semiconductor layers underlying the exposed oxide layers, removing the oxide layers and finally, growing gate oxide on the amorphized and non-amorphized regions of the SINR.
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References
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Patent

Semiconductor integrated circuit device with memory MISFETS and thin and thick gate insulator MISFETS

TL;DR: A semiconductor integrated circuit device and a method of manufacturing the same, wherein an MIS type memory transistor of a two-layered gate electrode structure is formed on the surface of a semiconductor substrate, and an MIS-type transistor for a low voltage having a comparatively thin gate oxide film and a MIS type transistor for high voltage with a comparatively thick gate oxide films are formed around the memory transistor as mentioned in this paper.
Patent

Nonvolatile static random access memory devices

TL;DR: In this article, a nonvolatile, semiconductor random access memory cells comprising a static, RAM cell and a non-volatile memory element which may be interconnected with the static random-access memory cell by capacitative coupling is proposed.
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Method of making a plurality of MOSFETs having different threshold voltages

TL;DR: In this article, an integrated circuit using MOSFETs having varying threshold voltages permitting improved performance and reduced area utilization on a monolithic semiconductor chip is produced by selectively varying ion implantation doses in the channels of the MOSFLETs.
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Method for preparing complementary semiconductor device

TL;DR: In this article, the gate electrodes of the P-and N-channel type silicon gate field effect transistors are formed by polycrystalline silicons of the same conductivity type.
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