Journal ArticleDOI
Gas discharge devices generating the directed fluxes of off-electrode plasma
Nikolay L. Kazanskiy,Nikolay L. Kazanskiy,V. A. Kolpakov,Vladimir V. Podlipnov,Vladimir V. Podlipnov +4 more
TLDR
In this article, a new approach for the generation of wide-format directed fluxes of low-temperature plasma outside the interelectrode space and a corresponding gas discharge device to be used for the formation of micro- and nano-sized diffraction patterns on wide format wafers have been proposed based on the analysis results of gas discharge devices that generate the ion-electron beams under highvoltage gas discharge.About:
This article is published in Vacuum.The article was published on 2014-03-01. It has received 43 citations till now. The article focuses on the topics: Dielectric barrier discharge & Electric discharge in gases.read more
Citations
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Journal ArticleDOI
“The Even-Lavie valve as a source for high intensity supersonic beam”
TL;DR: In this paper, the authors use extensive computer simulation to design and test a high pressure, fast acting, pulsed, valve that can produce short pulses of gas and then use flow simulations from shaped nozzles to optimize the beam density and finally use low density simulation to decide on the best skimmer shape.
Proceedings ArticleDOI
Modeling diffractive optics elements and devices
TL;DR: In this article, physical approximations and mathematical tools used when modeling diffractive optics elements and devices are analyzed, including focusing optical elements and a space-based Offner hyperspectral imaging spectrometer.
Proceedings ArticleDOI
Technological line for creation and research of diffractive optical elements
TL;DR: The Center for Collective Use of Equipment "Diffractive Optics and Nanophotonics" as discussed by the authors was created by joint efforts of scientists of Samara University and the Image Processing Systems Institute of the Russian Academy of Sciences.
Journal ArticleDOI
Efficiency of deep integration between a research university and an academic institute
TL;DR: In this article, the authors analyzed the results of long-standing close cooperation between an academic institute and a national research university and made analysis based on sharing experience of our Samara National Research University and the Image Processing Systems Institute of the RAS.
Proceedings ArticleDOI
Asymptotic research in computer optics
TL;DR: In this article, the authors give an overview of the methods and possibilities of the asymptotic studies for solving the computer optics and analyze the relevance of the use of the results in the design of diffractive optical elements for laser material processing.
References
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Book
Methods for Computer Design of Diffractive Optical Elements
TL;DR: In this paper, all the major aspects of designing planar DOEs are covered in one book, comprised of original methods developed by experts at the Russian Academy of Sciences' Image Processing Systems Institute.
Proceedings ArticleDOI
Design, fabrication, and measured performance of anti-reflecting surface textures in infrared transmitting materials
TL;DR: In this article, surface relief microstructures have been shown to be an effective alternative to thin-film anti-reflection (AR) coatings in many infrared and visible-band applications.
Journal ArticleDOI
Anisotropic Etching of SiO2 in High-Voltage Gas-Discharge Plasmas
TL;DR: In this article, anisotropic etching in a CF4-O2plasma produced by high-voltage gas discharge is reported. And the etch rate is mainly dependent on the oxygen percentage, plasma parameters, and the wafer temperature.
Journal ArticleDOI
Low-pressure hollow-cathode glow discharge plasma for broad beam gaseous ion source
TL;DR: In this article, a hollow-cathode glow discharge plasma for a dc broad-beam ion source was developed, where the high-current lowvoltage mode of discharge is limited to a pressure about 10−3 Torr, but for stable extraction of ions without breakdown the pressure needs to be at least one order of magnitude lower.
Journal ArticleDOI
Effect of bumps on the wafer on ion distribution functions in high-density argon and argon-chlorine discharges
TL;DR: In this article, a gridded energy analyzer was used to measure ion fluxes, energy distributions, and angular distributions near such bumps on a grounded electrode in an inductively coupled discharge in a Gaseous Electronics Conference Reference Cell.