Journal ArticleDOI
Growth of molybdenum on silicon: Structure and interface formation
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This article is published in Physical Review B.The article was published on 1991-08-15. It has received 58 citations till now. The article focuses on the topics: Silicon & Molybdenum.read more
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Journal ArticleDOI
Investigation of the amorphous-to-crystalline transition in Mo/Si multilayers
TL;DR: In this paper, the authors observed an abrupt amorphous-to-crystalline transition in the Mo layers at a thickness of ∼2 nm and showed that the transition exhibits several interesting features including a large decrease in the thickness of the Si-on-Mo interlayer and a significant increase in the roughness of the multilayer.
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Multilayer mirror technology for soft-x-ray projection lithography
TL;DR: Graded multilayer coatings can be used to modify the figure of optical substrates without increasing the surface roughness, and offers a potential method for precise fabrication of aspheric imaging optics.
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Interlayer transition zones in Mo/Si superlattices
S. A. Yulin,T. Feigl,T. Kuhlmann,N. Kaiser,Anatoli I. Fedorenko,V. V. Kondratenko,O. V. Poltseva,V.A. Sevryukova,A. Yu. Zolotaryov,Evgeniy N. Zubarev +9 more
TL;DR: In this article, the formation of interlayer transition zones (ITZs) in sputtered Mo/Si multilayer structures was studied by means of cross-section electron microscopy and grazing incidence reflectivity measurements.
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Structure and performance of Si/Mo multilayer mirrors for the extreme ultraviolet
Jon M. Slaughter,Dean W. Schulze,C. R. Hills,Alessandro Mirone,R. Stalio,Richard N. Watts,Charles S. Tarrio,Thomas B. Lucatorto,Michael Krumrey,Peter Mueller,Charles M. Falco +10 more
TL;DR: In this paper, the results of structural, chemical, and extreme ultraviolet (EUV) characterization of Si/Mo multilayers grown by sputtering and by UHV evaporation were reported.
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Experimental comparison of extreme-ultraviolet multilayers for solar physics
TL;DR: It is concluded that currently available optical constants cannot be used to adequately model the performance of many of these multilayers and the new Si/SiC multilayer offers the greatest spectral selectivity at the longer wavelengths.