Proceedings ArticleDOI
Minimal realization of dynamically balanced lumped mass WA gyroscope: dual foucault pendulum
Doruk Senkal,Alexandra Efimovskaya,Andrei M. Shkel +2 more
- pp 1-2
TLDR
In this paper, the Dual Foucault Pendulum (DFP) gyroscope is proposed, which consists of two mechanically coupled proof masses oscillating in anti-phase motion, creating a dynamically balanced resonator with xy symmetry in frequency and damping.Abstract:
We report a new type of MEMS rate integrating gyroscope. The Dual Foucault Pendulum (DFP) gyroscope consists of two dynamically equivalent, mechanically coupled proof masses, oscillating in anti-phase motion, creating a dynamically balanced resonator with x-y symmetry in frequency and damping. Phase synchronization is established by mechanical coupling of the two proof masses, whereas quadrature suppression is achieved by four differential shuttle pairs placed in-between. Dual axis tuning fork behavior provides vibration immunity and anchor loss mitigation, resulting in a Qfactor over 100,000 on both modes at a center frequency of 2.7 kHz. Whole angle mechanization is demonstrated by FPGAbased closed loop control of the gyroscope, showing a scale factor variation of 22 ppm RMS over 2 hours of measurement. We believe Dual Foucault Pendulum is the minimal realization of a dynamically balanced lumped mass whole angle (WA) gyroscope.read more
Citations
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Journal ArticleDOI
Micromechanical Rate Integrating Gyroscope With Angle-Dependent Bias Compensation Using a Self-Precession Method
TL;DR: In this paper, a generalized electronic feedback method for the compensation of MEMS gyroscope damping asymmetry (anisodamping) and stiffness asymmetric (anisoelasticity) on a stand-alone digital signal processing platform is presented.
Journal ArticleDOI
MEMS Gyroscope With Concentrated Springs Suspensions Demonstrating Single Digit Frequency Split and Temperature Robustness
TL;DR: In this article, a new design approach for X-Y symmetric resonator, emphasizing the increase in symmetry by localization of the device anchors, is reported, and the resonator is mechanized as a z-axis rate gyroscope.
Proceedings ArticleDOI
High quality factor MEMS gyroscope with whole angle mode of operation
TL;DR: In this paper, the authors present the angle estimation and its associated errors when the whole angle (WA) gyroscope was operating in a free vibration and a closed-loop controlled mode.
Journal ArticleDOI
Rate Integrating Gyroscope Using Independently Controlled CW and CCW Modes on Single Resonator
Takashiro Tsukamoto,Shuji Tanaka +1 more
TL;DR: In this paper, a rate integrating gyroscope (RIG) using independently controlled clockwise and counter clockwise (CCW) modes on a single MEMS resonator was reported.
Proceedings ArticleDOI
Dual Foucault Pendulum gyroscope
TL;DR: In this article, the dual Foucault pendulum (DFP) gyroscope was proposed to achieve high-Q degenerate mode operation, achieving an open-loop performance of 0.003 °/√h ARW and 0.27 °/h in-run bias stability.
References
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Proceedings ArticleDOI
A micromachined comb-drive tuning fork rate gyroscope
Jonathan J. Bernstein,Steve T. Cho,A.T. King,Anthony S. Kourepenis,P. Maciel,Marc S. Weinberg +5 more
TL;DR: In this article, the development of single-crystal and polysilicon tuning fork gyroscopes of very small size and low cost using microfabrication technology is reported.
Proceedings ArticleDOI
High Performance Matched-Mode Tuning Fork Gyroscope
TL;DR: In this paper, the authors presented the perfect matched-mode operation of a type I non-degenerate z-axis tuning-fork gyroscope (i.e., 0 Hz frequency split between high-Q drive and sense modes).
Proceedings ArticleDOI
Achieving long-term bias stability in high-q inertial mems by temperature self-sensing with a 0.5 millicelcius precision
TL;DR: In this paper, the authors present long-term bias drift compensation in high-quality (Q) factor MEMS gyroscopes using real-time temperature self-sensing, taking advantage of linear temperature dependence of the drive-mode resonant frequency for self- compensation of temperature-induced sense-mode drifts.