Optimal Scheduling of Complex Multi-Cluster Tools Based on Timed Resource-Oriented Petri Nets
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TLDR
Algorithms with polynomial complexity are presented to find the optimal cycle time and the one-unit periodic schedule of a complex multi-cluster tool whose bottleneck individual tool is process-bound.Abstract:
Complex multi-cluster tools have been extensively used in semiconductor manufacturing. It is crucial to increase their productivity by their effective operation. With structural complexity, multiple robots, and the interaction among individual tools, it is very challenging to schedule a tree-like multi-cluster tool. This paper investigates the scheduling problem of such a tool whose bottleneck individual tool is process-bound. The system is modeled by well-known discrete-event models, i.e., resource-oriented Petri nets. Based on the models, for the first time, this work develops necessary and sufficient conditions under which a one-unit (wafer) periodic schedule exists and shows that an optimal one-unit periodic schedule can always be found. Algorithms with polynomial complexity are presented to find the optimal cycle time and the one-unit periodic schedule. Industrial examples are used to illustrate the proposed method, and they show that a significant reduction in cycle time can be obtained in comparison with the existing method.read more
Citations
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Petri Net Modeling and Scheduling of a Close-Down Process for Time-Constrained Single-Arm Cluster Tools
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Scheduling Cluster Tools in Semiconductor Manufacturing: Recent Advances and Challenges
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References
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Book
Introduction to Algorithms
TL;DR: The updated new edition of the classic Introduction to Algorithms is intended primarily for use in undergraduate or graduate courses in algorithms or data structures and presents a rich variety of algorithms and covers them in considerable depth while making their design and analysis accessible to all levels of readers.
Patent
Method and apparatus for scheduling wafer processing within a multiple chamber semiconductor wafer processing tool having a multiple blade robot
TL;DR: In this article, a dual-blade wafer transfer mechanism is used to assign priority values to the chambers in a cluster tool, then move wafers from chamber to chamber in accordance with the assigned priorities.
Journal ArticleDOI
Modeling, analysis, simulation, scheduling, and control of semiconductor manufacturing systems: A Petri net approach
TL;DR: A formal approach such as Petri nets enables one to describe such complex discrete event systems precisely and thus allows one to perform both qualitative and quantitative analysis, scheduling and discrete-event control of them.
Journal ArticleDOI
Scheduling analysis of time-constrained dual-armed cluster tools
TL;DR: In this article, the authors proposed a method of determining the tool operation schedule for a time-constrained dual-armed cluster tools that have diverse wafer flow patterns and compared the performance of the new swap strategy with that of the conventional swap strategy.
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