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Packaging an integrated circuit die with backside metallization

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TLDR
In this article, a method of packaging integrated circuit (IC) dies is described, which includes applying a laminating material ( 44 ) to a wafer and separating the wafer into multiple IC dies such that the lamination material is applied to back surfaces ( 52 ) of the IC dies.
Abstract
A method ( 32 ) of packaging integrated circuit (IC) dies ( 48 ) includes applying ( 36 ) a laminating material ( 44 ) to a wafer ( 40 ), and separating ( 46 ) the wafer ( 40 ) into multiple IC dies ( 48 ) such that the laminating material ( 44 ) is applied to back surfaces ( 52 ) of the IC dies ( 48 ). Each of the IC dies ( 48 ) is positioned ( 62 ) with an active surface ( 50 ) facing a support substrate ( 56 ). An encapsulant layer ( 72 ) is formed ( 64 ) overlying the laminating material ( 44 ) and the back surfaces ( 52 ) of the IC dies ( 48 ) from a molding compound ( 66 ). The molding compound ( 66 ) and the laminating material ( 44 ) are removed from the back surfaces ( 52 ) of the IC dies ( 48 ) to form ( 76 ) openings ( 78 ) exposing the back surfaces ( 52 ). Conductive material ( 84, 88 ) is placed in the openings ( 78 ) and functions as a heat sink and/or a ground for the IC dies ( 48 ).

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Citations
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References
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Circuit device with at least partial packaging and method for forming

TL;DR: In this paper, a circuit device (15) is placed within an opening of a conductive layer (10) which is then partially encapsulated with an encapsulant (24) so that the active surface of the circuit device is coplanar with the conductive surface (10).
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