Journal ArticleDOI
Quantitative AES: determination of the effects of the relative orientations of the sample, electron gun and spectrometer on the direct spectrum shape for the establishment of standard reference spectra
Graham C. Smith,Martin P. Seah +1 more
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Caracterisation detaillee des intensites emises par des feuilles de cuivre et dargent, nettoyees par pulverisation ionique, dans le spectre direct afin de mieux comprendre les processus dans l'echantillon controlant ces intensites.Abstract:
Caracterisation detaillee des intensites emises par des feuilles de cuivre et d'argent, nettoyees par pulverisation ionique, dans le spectre direct afin de mieux comprendre les processus dans l'echantillon controlant ces intensites. Les caracterisations des dependances des intensites avec l'angle d'incidence du faisceau electronique et avec l'angle d'emission des electrons detectes fournissent des regles permettant le transfert des spectres de reference entre differentes configurations d'instruments et differentes conditions de mesureread more
Citations
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Journal ArticleDOI
Electron transport in solids for quantitative surface analysis
TL;DR: A survey of the fundamental physical quantities for the electron-solid interaction is presented and sources for these quantities in the literature as well as semi-empirical formulae are given as discussed by the authors.
Journal ArticleDOI
A Monte Carlo modeling of electron interaction with solids including cascade secondary electron production
Zejun Ding,Zejun Ding,R. Shimizu +2 more
TL;DR: In this paper, a new Monte Carlo simulation approach has been developed to describe electron scattering and secondary electron generation processes in solids, based on the uses of Mott's elastic scattering cross section and Penn's dielectric function.
Journal ArticleDOI
XPS reference procedure for the accurate intensity calibration of electron spectrometers— results of a BCR intercomparison co‐sponsored by the VAMAS SCA TWA
TL;DR: In this paper, a calibration procedure has been developed for XPS instrument intensity scales, which is achieved by measuring the spectrum for reference foils of Ag, Au and Cu for which the true spectrum has been measured usng the metrology spectrometer.
Journal ArticleDOI
Quantitative AES and XPS: Determination of the electron spectrometer transmission function and the detector sensitivity energy dependencies for the production of true electron emission spectra in AES and XPS†
Martin P. Seah,Graham C. Smith +1 more
TL;DR: In this article, the energy dependence of both the spectrometer transmission function and the detector sensitivity were determined experimentally for a modified VG Scientific ESCALAB II, operated in both the constant ΔE/E and constant Δ E modes, compared with theoretical estimates.
Journal ArticleDOI
A system for the intensity calibration of electron spectrometers
TL;DR: In this article, a system for the calibration of the intensity/energy response function for electron spectrometers used in AES and X-ray photoelectron spectroscopy (XPS) is described.
References
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Journal ArticleDOI
Quantitative Analysis by Auger Electron Spectroscopy
TL;DR: In this article, a short review of the theoretical background of a physical model for the quantification of Auger electron spectroscopy (AES) for surface analysis is presented, and functional representations of the backscattering factors for different angles of incidence (ψ) for primary energies ranging from 3 to 10 keV are proposed.
Journal ArticleDOI
Matrix effects in quantitative auger analysis of dilute alloys
P.M. Hall,J.M. Morabito +1 more
TL;DR: In this article, the authors evaluate the correction factors required for the last three phases of the Auger process, including peak shape, sputtering, atomic density, escape depth, and backscattering.
Journal ArticleDOI
Angle-resolved XPS studies of oxides at NbN, NbC, and Nb surfaces
A. Darlinski,J. Halbritter +1 more
TL;DR: In this paper, angle-resolved XPS (ARXPS) measurements have been performed to quantify the differences in thickness and electronic properties of the oxides of Nb compounds.
Journal ArticleDOI
Data compilations: their use to improve measurement certainty in surface analysis by aes and xps
TL;DR: In this article, a survey of data compliations for surface analysis is presented, focusing on the provision of numerical values for use in calculations of quantitative surface analysis, providing unbiased data for the development of theory, and establishing a benchmark to judge the value of current research.
Related Papers (5)
Quantitative AES and XPS: Determination of the electron spectrometer transmission function and the detector sensitivity energy dependencies for the production of true electron emission spectra in AES and XPS†
Martin P. Seah,Graham C. Smith +1 more