Journal ArticleDOI
Residual gas analysers and their use in high vacuum systems
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TLDR
In this paper, the limitations of the small quadropole mass spectrometer when used routine measurements in relatively good vacuum systems are discussed and the authors suggest that careful calibration procedures should be incorporated into any experimental programme if quantitative results are required.About:
This article is published in Vacuum.The article was published on 1987-01-01. It has received 18 citations till now.read more
Citations
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Journal ArticleDOI
Development of water vapor transmission rate measuring device using a quadrupole mass spectrometer and standard gas barrier films down to the 10−6 g m−2 day−1 level
TL;DR: The reliability of the QMS measurements was improved by including a porous plug with known molecular conductance in the device to generate a reference molar flux for in situ QMS calibration.
Journal ArticleDOI
Stability tests of quadrupole mass spectrometer by two-stage flow-dividing system
TL;DR: In this paper, stability tests of two quadrupole mass spectrometers (QMSs) were performed using a two-stage flow-dividing system from the following viewpoints: (1) fluctuation and drift of ion current, (2) repeatability of ion currents, (3) change in ion current owing to prior conditions of use, (4) long-term stability of sensitivity, and (5) interference effect.
Journal ArticleDOI
Process monitoring with residual gas analyzers (RGAs): limiting factors
TL;DR: In this paper, the important factors affecting instrument performance, illustrates the magnitude of the effects for different instruments, recommends instrument test procedures, and suggests operating parameters and procedures that can minimize these effects.
Book ChapterDOI
Chapter 5 – Process Diagnostics and Coating Characteristics
TL;DR: In this paper, the authors describe techniques for measuring the coating thickness, optical, electrical, and barrier properties using the light produced in the plasma, which is used to verify the functionality of the coating.
Journal ArticleDOI
The effects of a quadrupole mass analyser on measurement of UHV residual gas composition
TL;DR: In this paper, the effect of both the quadrupole mass analyser (QMA) and the ion-getter-pump (IGP) on residual gas composition and on the composition during gas dosing were investigated.
References
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Journal ArticleDOI
An investigation of the factors determining maximum resolution in a quadrupole mass spectrometer
A.E. Holme,W.J. Thatcher,JH Leck +2 more
TL;DR: In this paper, the authors investigated the factors that limit the maximum resolution of a conventional quadrupole mass spectrometer under normal operating conditions, including the effects of imperfections in mechanical construction and electrical supplies and also operation with contaminated electrode surfaces.
Journal ArticleDOI
A small analytical quadrupole mass spectrometer designed for operation in high and ultra high vacuum systems
A.E. Holme,W.J. Thatcher,JH Leck +2 more
TL;DR: In this article, the characteristics of a small quadrupole mass spectrometer are described in detail and the requirements of an analytical instrument for use in high and ultra high vacuum systems have been met.