Journal ArticleDOI
Slow ionising high-frequency electromagnetic wave along a thin plasma column
TLDR
In this paper, the problem of the propagation of a slow high-frequency ionising electromagnetic wave along a thin plasma cylinder surrounded by a dielectric tube is considered, assuming that the characteristic diffusion and thermal conductivity lengths are small in comparison with the discharge length.Abstract:
The problem of the propagation of a slow high-frequency ionising electromagnetic wave along a thin plasma cylinder surrounded by a dielectric tube is considered, assuming that the characteristic diffusion and thermal conductivity lengths are small in comparison with the discharge length. The wave phase characteristics as well as the radial and axial profiles of the wave field and of the plasma electron temperature and density are determined. The obtained results suggest an approach for explanation of the experimental data.read more
Citations
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Journal ArticleDOI
The similarity laws for the maintenance field and the absorbed power per electron in low-pressure surface wave produced plasmas and their extension to HF plasmas in general
C M Ferreira,Michel Moisan +1 more
TL;DR: In this paper, the authors present a theoretical analysis of high-frequency, diffusion-controlled discharges in which the ionization is provided by direct electron impact with gas atoms within the discharge volume.
Journal ArticleDOI
Axial structure of low-pressure high-frequency discharges sustained by travelling electromagnetic surface waves
Ivan Zhelyazkov,V. Atanassov +1 more
TL;DR: In this article, a theoretical review of surface wave plasmas is presented, where the authors consider the effects of an axially directed static magnetic field on the dynamics of the discharges.
Journal ArticleDOI
Microwave and RF surface wave sustained discharges as plasma sources for plasma chemistry and plasma processing
TL;DR: The surface wave-produced plasmas (SWP) as discussed by the authors are a class of RF and microwave induced plasm which can be applied over an extremely broad range of wave frequencies (27 MHz to 10 GHz demonstrated) and gas pressures.
Journal ArticleDOI
Tube diameter and wave frequency limitations when using the electro magnetic surface wave in the m=1 (dipolar) mode to sustain a plasma column
J. Margot-Chaker,Michel Moisan,Mohamed Chaker,V. M. M. Glaude,P. Lauque,J. Paraszczak,G. Sauve +6 more
TL;DR: In this article, the conditions required to sustain a plasma column through the propagation of the m=1 mode surface wave have been investigated, and it was shown that the specific dependence of the wave attenuation coefficient on the frequency and on the tube diameter can ultimately account for the observed limitations when the wave is used to sustaining a plasma.
Journal ArticleDOI
Travelling-wave-sustained discharges
Hans Schlüter,A. Shivarova +1 more
TL;DR: In this paper, a review of the fluid-plasma models of the diffusion-controlled regime of the travelling-wave-sustained discharges (TWSDs) is presented.
References
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Journal ArticleDOI
Properties and applications of surface wave produced plasmas
Michel Moisan,Carlos M. Ferreira,Y. Hajlaoui,D. Henry,Joseph Hubert,R. Pantel,A. Ricard,Zenon Zakrzewski +7 more
TL;DR: In this article, the properties of cylindrical plasmas sustained by the azimuthally symmetric surface wave are investigated. And the radial and axial electron density distributions, as well as the radial density distributions of excited (radiative and metastable) atoms are also presented.
Journal ArticleDOI
Axial electron density and wave power distributions along a plasma column sustained by the propagation of a surface microwave
TL;DR: In this paper, the relation between the axial distribution of the electron density observed along the plasma column and the corresponding power distribution of surface wave that produces it is investigated, and it is found that the electron densities decrease almost linearly along the column in the direction of the wave propagation.
Journal ArticleDOI
Modelling of a low-pressure plasma column sustained by a surface wave
TL;DR: In this paper, a complete theoretical description of a low-pressure cylindrical plasma column sustained by a weakly damped surface wave is derived in which the equations describing the steady-state plasma maintenance conditions are coupled with the surface wave propagation and attenuation characteristics.
Journal ArticleDOI
Theory of a plasma column sustained by a surface wave
TL;DR: In this paper, a selfconsistent theory of a cylindrical plasma column sustained by a surface wave is derived which gives absolute values and radial profiles of electron density, electron temperature, HF electric field intensity and atomic excited state densities as a function of gas pressure, wave frequency and HF absorbed power.
Journal ArticleDOI
Attenuation of a surface wave in an unmagnetized RF plasma column
TL;DR: In this paper, a simple theory of collisional attenuation, obtained by extension of the collisionless theory to the case of few collisions, predicts very well the dependence of the attenuation on the electron density, the electron collision frequency, and the geometry of the plasma column.