Structural and morphological studies on Bi1-xCaxMnO3 thin films grown by RF magnetron sputtering

TLDR: In this article, X-ray diffraction pattern shows that the BiMnO3 films are crystallized in monoclinic structure with C2 space group and the crystallite size and induced strain in the prepared films are measured by W-H plot.

Abstract: Bi1-xCaxMnO3 (0 ≤ X ≤ 0.4) thin films are deposited on n–type Si (100) substrate at 800 °C by RF magnetron sputtering. X-ray diffraction pattern shows that the films are crystallized in monoclinic structure with C2 space group. The crystallite size and induced strain in the prepared films are measured by W-H plot. The cell parameters and texture coefficient of the films are calculated. The surface morphology of the films is examined by atomic force microscope. The study confirms the optimum level of calcium doping is 20 at. % in Bi site of BiMnO3 film, these findings pave the way for further research in the Ca modified BiMnO3 films towards device fabrication.