Journal ArticleDOI
The future of magnetic sensors
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TLDR
The magnetic sensor microsystems look bright with many promising application areas as discussed by the authors, but the main challenges are the three-dimensional structure of the coils and the low magnetic permeability of integrated ferromagnetic cores.Abstract:
The operation of magnetic-field sensors is based on many different physical principles ranging from induction to magneto-optical effects. This in turn leads to a vast range of possible magnetic sensor types. What will finally decide the commercial viability of a particular magnetic sensor is its performance as well as its compatibility with miniaturization and microelectronic circuits. The magnetic sensors with the most potential for future applications include: Hall devices, magnetoresistors, inductive coils and fluxgates. The Hall device, while very compatible with microelectronics, suffers from a limited sensitivity in silicon, a high level oof 1 F noise and a relatively large offset. Ferromagnetic magnetoresistors generally have a high sensitivity at a low field; associated problems are the flipping effect and hysteresis. Inductive coils find many applications in proximity and distance sensors, but the miniaturization of coils is difficult. The fluxgate is a highly sensitive magnetic sensor. In principle, it could be integrated, but the main challenges are the three-dimensional structure of the coils and the low magnetic permeability of integrated ferromagnetic cores. The performance of sensors can be considerably improved by incorporating them into a system and using synergistic relationships such as feedback and compensation. The future of magnetic sensor microsystems looks bright with many promising application areas.read more
Citations
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Journal ArticleDOI
Magnetic field measurements with a novel surface micromachined magnetic-field sensor
H. Emmerich,M. Schofthaler +1 more
TL;DR: In this paper, the magnetic field was measured by quantifying the displacement of the conducting beam by comb-electrodes, which formed a differential capacitance change by measuring the magnetic force.
Journal ArticleDOI
A micro-fluxgate magnetic sensor using micromachined planar solenoid coils
T.M. Liakopoulos,Chong H. Ahn +1 more
TL;DR: In this article, a planar 3-dimensional magnetic fluxgate sensor based on micromachined 3D toroidal type planar coils used as excitation and sensing elements is presented, which has excellent linear response over the range of −500 μT to +500 µT with a system sensitivity of 8360 V T−1 and a resolution of 60 nT.
Journal ArticleDOI
Highly Sensitive Flexible Magnetic Sensor Based on Anisotropic Magnetoresistance Effect
Zhiguang Wang,Zhiguang Wang,Xinjun Wang,Menghui Li,Yuan Gao,Zhongqiang Hu,Tianxiang Nan,Xianfeng Liang,Huaihao Chen,Jia Yang,Syd Cash,Nian X. Sun +11 more
TL;DR: A highly sensitive flexible magnetic sensor based on the anisotropic magnetoresistance effect is fabricated and excellent deformation stability is achieved after wrapping of the flexible sensor, with bending radii down to 5 mm.
Journal ArticleDOI
Batch-fabricated high-performance graphene Hall elements
TL;DR: It is shown that graphene is intrinsically an ideal material for Hall elements which may harness the remarkable properties of graphene, i.e. extremely high carrier mobility and atomically thin active body, to create ideal magnetic sensors with high sensitivity, excellent linearity and remarkable thermal stability.
Journal ArticleDOI
Suppression of magnetic noise in the fundamental-mode orthogonal fluxgate
TL;DR: In this article, it has been shown that a great enough dc bias practically completely suppresses the magnetic noise generated in the fluxgate core by the ac-bias field; the flux-gate resolution becomes limited only by the excess electric noise in the ac bias current.
References
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Journal ArticleDOI
Giant magnetoresistance of (001)Fe/(001)Cr magnetic superlattices.
Mario Norberto Baibich,J. M. Broto,Albert Fert,F. Nguyen Van Dau,Frédéric Petroff,P. Etienne,G. Creuzet,A. Friederich,Jean Chazelas +8 more
TL;DR: This work ascribes this giant magnetoresistance of (001)Fe/(001)Cr superlattices prepared by molecularbeam epitaxy to spin-dependent transmission of the conduction electrons between Fe layers through Cr layers.
Journal ArticleDOI
Giant magnetoresistance in heterogeneous Cu-Co alloys.
Ami E. Berkowitz,J. R. Mitchell,Matthew J. Carey,A. P. Young,Shufeng Zhang,Frederick E. Spada,F. T. Parker,Andreas Hütten,G. Thomas +8 more
TL;DR: Giant magnetoresistance in heterogeneous thin film Cu-Co alloys consisting of ultrafine Co-rich precipitate particles in a Cu-rich matrix is observed, modeled by including spin-dependent scattering at the interfaces between the particles and the matrix, as well as the spin- dependent scattering in the Co- rich particles.
Journal ArticleDOI
On a new action of the magnet on electric currents
TL;DR: In this article, a new action of the magnet on electric currents was described, and the magnet was shown to have a strong effect on the electric currents of the magnetic field of a magnet.
Journal ArticleDOI
A review of magnetic sensors
TL;DR: In this paper, the most common technologies used for magnetic field sensing are described and compared, including search coil, flux-gate, optically pumped, nuclear precession, SQUID, Hall effect, magnetoresistive, magnetodiode, magnetotransistor, fiber optic, and magnetooptic technologies.