Patent
Water-barrier performance of an encapsulating film
Tae Kyung Won,Yadav Sanjay D +1 more
TLDR
In this article, a method and apparatus for depositing a material layer onto a substrate is described, which can be used as an encapsulating layer for various display applications which require low temperature deposition process due to thermal instability of underlying materials used.Abstract:
A method and apparatus for depositing a material layer onto a substrate is described. The method includes delivering a mixture of precursors for the material layer into a process chamber and depositing the material layer on the substrate at low temperature. The material layer can be used as an encapsulating layer for various display applications which require low temperature deposition process due to thermal instability of underlying materials used. In one aspect, the encapsulating layer includes one or more material layers (multilayer) having one or more barrier layer materials and one or more low-dielectric constant materials. The encapsulating layer thus deposited provides reduced surface roughness, improved water-barrier performance, reduce thermal stress, good step coverage, and can be applied to many substrate types and many substrate sizes. Accordingly, the encapsulating layer thus deposited provides good device lifetime for various display devices, such as OLED devices. In another aspect, a method of depositing an amorphous carbon material on a substrate at low temperature is provided. The amorphous carbon material can be used to reduce thermal stress and prevent the deposited thin film from peeling off the substrate.read more
Citations
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Patent
Organic light-emitting diode display
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Organic Light Emitting Diode Display and Manufacturing Method Thereof
So-Young Lee,Yoon-Hyeung Cho,Min-Ho Oh,Byoung-Duk Lee,Yong-Tak Kim,Sang-Hwan Cho,Yun-Ah Chung,Seung-Yong Song,Jong-Hyuk Lee +8 more
TL;DR: In this article, an organic light emitting diode display includes a substrate, a control electrode is on the substrate, an input electrode and an output electrode are on the gate insulating film and face each other, an oxide semiconductor is between the input and the output electrode and on the control electrode.
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Semiconductor processing system and methods using capacitively coupled plasma
Jang-Gyoo Yang,Matthew L. Miller,Xinglong Chen,Kien N. Chuc,Qiwei Liang,Shankar Venkataraman,Dmitry Lubomirsky +6 more
TL;DR: In this paper, a capacitively coupled plasma (CCP) unit is described inside a process chamber, and a pedestal is positioned below a gas reaction region into which the activated gas travels from the CCP unit.
References
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Patent
Light-emitting device
TL;DR: In this paper, a light-emitting device with the use of an amorphous oxide was presented, which has a lightemitting layer existing between first and second electrodes and a field effect transistor, of which the active layer is an Amorphous.
Patent
Low pressure vapor phase deposition of organic thin films
TL;DR: In this paper, the authors present a method for preparing organic thin films on substrates, the method comprising the steps of providing a plurality of organic precursors in the vapor phase, and reacting the plurality or organic pre-agents at a sub-atmospheric pressure.
Patent
Hydrogen assisted undoped silicon oxide deposition process for HDP-CVD
TL;DR: In this paper, a method of forming a silicon oxide layer over a substrate disposed in a high density plasma substrate processing chamber was proposed, where the hydrogen-containing source was selected from the group of H2, H2O, NH3, CH4 and C2H6.
Proceedings ArticleDOI
Gas permeation and lifetime tests on polymer-based barrier coatings
Paul E. Burrows,Gordon L. Graff,Mark E. Gross,Peter M. Martin,Michael G. Hall,Eric S. Mast,Charles C. Bonham,Wendy D. Bennett,Lech Michalski,Michael S. Weaver,Julie J. Brown,Daniel Fogarty,Linda S. Sapochak +12 more
TL;DR: BarixTM as discussed by the authors is a flexible, transparent plastic substrate for OLED display applications, which is composed of a flexible composite thin film barrier and transparent conductive oxide (CO) oxide.