A
Alun Harris
Researcher at Newcastle University
Publications - 49
Citations - 632
Alun Harris is an academic researcher from Newcastle University. The author has contributed to research in topics: Gyroscope & Cantilever. The author has an hindex of 12, co-authored 49 publications receiving 610 citations.
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A system for the dynamic characterization of microstructures
TL;DR: In this article, a fully automated measurement system designed to evaluate the dynamic characteristics of micromechanical structures (millimeter dimensions) has been presented to validate the system, vibration measurements have been carried on two structures-a micromachined silicon cantilever and bridge-and the results are presented.
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SiC cantilever resonators with electrothermal actuation
Liudi Jiang,Rebecca Cheung,John Hedley,Musaab Hassan,Alun Harris,Jim Burdess,Mehran Mehregany,Christian A. Zorman +7 more
TL;DR: In this article, the 3C-SiC cantilever resonators designed for electrothermal actuation are presented and an analytical model has been developed to understand the electrical power distribution in the cantilevers for the different material systems as well as the different metal terminations.
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Principles of a three-axis vibrating gyroscope
TL;DR: In this article, the principal features of a three-axis ring gyroscope are described and the equations of motion, the response to constant rates of turn, and the relationships between the modes of vibration are derived.
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Fabrication of SiC microelectromechanical systems using one-step dry etching
Liudi Jiang,Rebecca Cheung,Mohammed O. Hassan,Alun Harris,Jim Burdess,Christian A. Zorman,Mehran Mehregany +6 more
TL;DR: In this paper, a simple one-step inductively coupled plasma etching technique has been developed for the fabrication of SiC resonant beam structures and straight cantilever and bridge devices have been made successfully.
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Mechanical properties of a 3C-SiC film between room temperature and 600 °C
Michele Pozzi,Musaab Hassan,Alun Harris,Jim Burdess,Liudi Jiang,KK Lee,Rebecca Cheung,GJ Phelps,Nicholas G. Wright,Christian A. Zorman,Mehran Mehregany +10 more
TL;DR: In this paper, a cubic poly-SiC film was used to construct cantilevers and bridges between room temperature (RT) and 600 °C. The residual tensile stress is found to depend on temperature in a complex manner.