R
Rebecca Cheung
Researcher at University of Edinburgh
Publications - 171
Citations - 3196
Rebecca Cheung is an academic researcher from University of Edinburgh. The author has contributed to research in topics: Reactive-ion etching & Etching (microfabrication). The author has an hindex of 27, co-authored 161 publications receiving 2840 citations. Previous affiliations of Rebecca Cheung include ETH Zurich & University of Canterbury.
Papers
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Sub-diffraction-limited patterning using evanescent near-field optical lithography
TL;DR: In this article, a reactive ion etching process using SF6 has been developed to transfer the patterns to a depth of more than 100 nm into silicon, showing that a high contrast image is present within the resist layer, and that the exposure is dominated by one polarization for the grating structures studied.
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Fluorination of carbon nanotubes in CF4 plasma
TL;DR: The effect of CF4 gaseous plasma exposure to single-wall carbon nanotubes (CNTs) has been studied in this article, where Raman spectroscopy results show that CNTs have gained more disordered sp3 bonds associated with functionalization, as both the flow rates of gas in the plasma and exposure time in the CF4 plasma are increased.
Book
Silicon Carbide Microelectromechanical Systems for Harsh Environments
TL;DR: In this article, the authors describe the science and technology of silicon carbide (SiC) microelectromechanical systems (MEMS), from the creation of SiC material to the formation of final system, through various expert contributions by several leading key figures in the field.
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Elastic properties of suspended multilayer WSe2
TL;DR: In this article, the elastic properties of suspended multilayer WSe2, a promising two-dimensional (2D) semiconducting material combined with high optical quality, were investigated.
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Reactive ion etching of GaAs using a mixture of methane and hydrogen
TL;DR: In this article, a dry etching technique which is capable of producing low-damage, high-aspect-ratio structures on a nanometric scale in GaAs is described.