C
Carl E. Larson
Researcher at IBM
Publications - 67
Citations - 1532
Carl E. Larson is an academic researcher from IBM. The author has contributed to research in topics: Resist & Chemical vapor deposition. The author has an hindex of 21, co-authored 67 publications receiving 1522 citations.
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Sulfonium salt photoinitiators
TL;DR: Alkyldiarylsulfonium salts of 9, 10, dithiophenoxyanthracene are useful as photoinitiators in resist compositions, such as epoxy resin formulations, particularly using long wavelength light as mentioned in this paper.
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Determination of coupled acid catalysis-diffusion processes in a positive-tone chemically amplified photoresist
Frances A. Houle,William D. Hinsberg,Michael Morrison,Martha I. Sanchez,Gregory M. Wallraff,Carl E. Larson,John A. Hoffnagle +6 more
TL;DR: In this article, a combined experimental and modeling protocol is presented to elucidate the chemistry and physics of the reaction-diffusion process, which provides a means of developing a set of predictive, mutually comparable data that will allow new insights to be developed into the nanoscale behavior.
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Chemical vapor deposition of copper from 1,5‐cyclooctadiene copper(I) hexafluoroacetylacetonate
Scott K. Reynolds,Christopher J. Smart,Emil F. Baran,Thomas H. Baum,Carl E. Larson,Phillip J. Brock +5 more
TL;DR: In this article, the chemical vapor deposition of copper from 1,5-cyclooctadiene Cu(I) hexafluoroacetylacetonate, a moderately volatile yellow cystalline solid, was studied.
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Chemical Vapor Deposition of Gold
TL;DR: In this article, les meilleurs precurseurs les Me 2 Au(acac), Me 2 AU(tfac), and Me 2 au(hfac) are described.
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Laser‐induced chemical vapor deposition of aluminum
TL;DR: In this article, the laser-induced deposition of high-purity aluminum metal has been achieved by pyrolytic decomposition of trimethylamine aluminum hydride, which is a non-pyrophoric trialkylaluminum precursor.