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Cheng Ta Ko

Researcher at National Chiao Tung University

Publications -  5
Citations -  375

Cheng Ta Ko is an academic researcher from National Chiao Tung University. The author has contributed to research in topics: Anodic bonding & Thermocompression bonding. The author has an hindex of 4, co-authored 5 publications receiving 317 citations. Previous affiliations of Cheng Ta Ko include Industrial Technology Research Institute.

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Wafer-level bonding/stacking technology for 3D integration

TL;DR: Wafer-level bonding technologies are reviewed and described in detail, including bonding materials and bonding conditions, and the corresponding 3D integration technologies and platforms developed world-wide are addressed.
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Low temperature bonding technology for 3D integration

TL;DR: Various low temperature bonding technologies are reviewed and introduced, as well as the latest developments in world-wide companies and research institutes, to solve the performance degradation issue of the integrated devices.
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Reliability of key technologies in 3D integration

TL;DR: The reliability of key technologies in 3D integration with these representative platforms are summarized in the paper to address the feasibility of 3D IC in mass production, which could be the guidelines for future development and applications of3D integration technology.
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BCB-to-oxide bonding technology for 3D integration

TL;DR: This proposed mechanism of BCB-to-oxide bonding provides a guideline for polymer to oxide hybrid bonding technology in 3D integration and has better bonding quality than that of thermal oxide to BCB bonding.
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Bonding temperature optimization and property evolution of SU-8 material in metal/adhesive hybrid wafer bonding.

TL;DR: This research provides guidelines of material selection and bonding parameters for heterogeneous integration, 3DIC and MEMS applications using metal/adhesive hybrid bonding using SU-8 material.