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Chun Xie
Researcher at Tongji University
Publications - 21
Citations - 76
Chun Xie is an academic researcher from Tongji University. The author has contributed to research in topics: Extreme ultraviolet & Extreme ultraviolet lithography. The author has an hindex of 4, co-authored 17 publications receiving 56 citations.
Papers
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Journal ArticleDOI
High reflectance Cr/V multilayer with B(4)C barrier layer for water window wavelength region.
Qiushi Huang,Jiani Fei,Yang Liu,Pin Li,Mingwu Wen,Chun Xie,Philippe Jonnard,Angelo Giglia,Zhong Zhang,Kun Wang,Zhanshan Wang +10 more
TL;DR: According to the transmission electron microscope measurements, the layer structure improvement with barrier layers can be attributed to the suppression of the crystallization of vanadium inside the structure.
Journal ArticleDOI
Effect of the surface roughness on X-ray absorption by mirrors operating at extremely small grazing angles.
Mingwu Wen,Igor V. Kozhevnikov,Frank Siewert,Aleksey V. Buzmakov,Chun Xie,Qiushi Huang,Zhanshan Wang,Liubov Samoylova,Harald Sinn +8 more
TL;DR: This study theoretically analyzes an increase in X-ray absorption by a grazing incidence mirror due to its surface roughness and demonstrates that the increase can be several hundred times larger than predicted by the Nevot-Croce formula.
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A table-top EUV focusing optical system with high energy density using a modified Schwarzschild objective and a laser-plasma light source.
Zhe Zhang,Wenbin Li,Qiushi Huang,Zhong Zhang,Shengzhen Yi,Liuyang Pan,Chun Xie,Przemyslaw Wachulak,Henryk Fiedorowicz,Zhanshan Wang +9 more
TL;DR: For investigating extreme ultraviolet (EUV) damage on optics, a table-top EUV focusing optical system was developed in the laboratory based on a modified Schwarzschild objective with a large numerical aperture and a laser-plasma light source.
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Development of imaging x-ray telescopes at Tongji University
Zhanshan Wang,Yingyu Liao,Zhengxiang Shen,Qiushi Huang,Bin Ma,Zhong Zhang,Xiaoqiang Wang,Kun Wang,Jun Yu,Shenghao Chen,Wei Zhenbo,Shuang Ma,Yang Yang,Chun Xie,Vadim Burwitz +14 more
TL;DR: The imaging x-ray telescope (IXT) was first developed at the Institute of Precision Optical Engineering of Tongji University in 2007 as mentioned in this paper, and it has made great progress on the development of mirror fabrication, coatings, and optic assembly.
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Improving Thickness Uniformity of Mo/Si Multilayers on Curved Spherical Substrates by a Masking Technique
Zhe Zhang,Runze Qi,Yiyun Yao,Yingna Shi,Wenbin Li,Qiushi Huang,Yi Shengzhen,Zhong Zhang,Zhanshan Wang,Chun Xie +9 more
TL;DR: In this paper, a masking technique was used to improve the thickness uniformity of a Mo/Si multilayer deposited on a curved spherical mirror by direct current (DC) magnetron sputtering with planetary rotation stages.