Nanotechnology is the science of understanding matter and the control of matter at dimensions of 100 nm or less. Encompassing nanoscale science, engineering, and technology, nanotechnology involves imaging, measuring, modeling, and manipulation of matter at this level of precision. An important aspect of research in nanotechnology involves precision control and manipulation of devices and materials at a nanoscale, i.e., nanopositioning. Nanopositioners are precision mechatronic systems designed to move objects over a small range with a resolution down to a fraction of an atomic diameter. The desired attributes of a nanopositioner are extremely high resolution, accuracy, stability, and fast response. The key to successful nanopositioning is accurate position sensing and feedback control of the motion. This paper presents an overview of nanopositioning technologies and devices emphasizing the key role of advanced control techniques in improving precision, accuracy, and speed of operation of these systems.

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A Survey of Control Issues in Nanopositioning

The field of cantilever-based sensing emerged in the mid-1990s and is today a well-known technology for label-free sensing which holds promise as a technique for cheap, portable, sensitive and highly parallel analysis systems. The research in sensor realization as well as sensor applications has increased significantly over the past 10 years. In this review we will present the basic modes of operation in cantilever-like micromechanical sensors and discuss optical and electrical means for signal transduction. The fundamental processes for realizing miniaturized cantilevers are described with focus on silicon- and polymer-based technologies. Examples of recent sensor applications are given covering such diverse fields as drug discovery, food diagnostics, material characterizations and explosives detection.

http://iopscience.iop.org/article/10.1088/0034-4885/74/3/036101/pdf

Cantilever-like micromechanical sensors

https://hansmalab.physics.ucsb.edu/pdf/ComponentsForHighSpeedAFM.pdf

Components for high speed atomic force microscopy

The review will describe the various scanning probe microscopy tips and cantilevers used today for scanning force microscopy and magnetic force microscopy. Work undertaken to quantify the properties of cantilevers and tips, e.g. shape and radius, is reviewed together with an overview of the various tip–sample interactions that affect dimensional measurements.

https://iopscience.iop.org/article/10.1088/0022-3727/41/10/103001/pdf

Aspects of scanning force microscope probes and their effects on dimensional measurement

In the postgenomic era, information is king and information-rich technologies are critically important drivers in both fundamental biology and medicine. It is now known that single-parameter measurements provide only limited detail and that quantitation of multiple biomolecular signatures can more fully illuminate complex biological function. Label-free technologies have recently attracted significant interest for sensitive and quantitative multiparameter analysis of biological systems. There are several different classes of label-free sensors that are currently being developed both in academia and in industry. In this critical review, we highlight, compare, and contrast some of the more promising approaches. We describe the fundamental principles of these different methods and discuss advantages and disadvantages that might potentially help one in selecting the appropriate technology for a given bioanalytical application.

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Label-free technologies for quantitative multiparameter biological analysis

This article describes microprobes for noncontact scanning force microscopy that make use of a direct-oscillating thermally driven bimorph actuator with integrated piezoresistive readout sensor The sensitivity has been increased using direct current for biasing and alternating current for exciting the thermally driven cantilever in a higher flexural mode The cantilever operates in the phase-shift atomic force microscopy (AFM) detection technique The main advantage of phase imaging is the higher z resolution at high scan rates and much lower forces than in height imaging with contact AFM Critical dimensions measurements illustrating the imaging capability and resolution of our new scanning proximal probe are demonstrated

Micromachined atomic force microscopy sensor with integrated piezoresistive sensor and thermal bimorph actuator for high-speed tapping-mode atomic force microscopy phase-imaging in higher eigenmodes

E. Tomerov

Papers

Micromachined atomic force microscopy sensor with integrated piezoresistive sensor and thermal bimorph actuator for high-speed tapping-mode atomic force microscopy phase-imaging in higher eigenmodes

Thermally driven micromechanical beam with piezoresistive deflection readout