T
Tzv. Ivanov
Researcher at Technische Universität Ilmenau
Publications - 20
Citations - 545
Tzv. Ivanov is an academic researcher from Technische Universität Ilmenau. The author has contributed to research in topics: Piezoresistive effect & Cantilever. The author has an hindex of 13, co-authored 20 publications receiving 523 citations. Previous affiliations of Tzv. Ivanov include University of Kassel.
Papers
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Journal ArticleDOI
Micromachined atomic force microscopy sensor with integrated piezoresistive sensor and thermal bimorph actuator for high-speed tapping-mode atomic force microscopy phase-imaging in higher eigenmodes
R. Pedrak,Tzv. Ivanov,K. Ivanova,Teodor Gotszalk,N. Abedinov,Ivo W. Rangelow,Klaus Edinger,E. Tomerov,Thomas Schenkel,P. Hudek +9 more
TL;DR: In this paper, the authors describe microprobes for noncontact scanning force microscopy that make use of a directoscillating thermally driven bimorph actuator with integrated piezoresistive readout sensor.
Journal ArticleDOI
Thermally driven micromechanical beam with piezoresistive deflection readout
TL;DR: In this article, the authors investigated the actuating efficiency of an integrated cantilever microheater with piezoresistive readout for micro-and nanorobotic systems and advanced high speed scanning probe microscopy.
Journal ArticleDOI
Piezoresistive and self-actuated 128-cantilever arrays for nanotechnology applications
Ivo W. Rangelow,Tzv. Ivanov,K. Ivanova,B. E. Volland,Piotr Grabiec,Y. Sarov,Arun Persaud,Teodor Gotszalk,P. Zawierucha,M. Zielony,D. Dontzov,B. Schmidt,M. Zier,N. Nikolov,Ivan Kostic,Wolfgang Engl,T. Sulzbach,J. Mielczarski,Stefan Kolb,Du P. Latimier,R. Pedreau,V. Djakov,S. E. Huq,Klaus Edinger,O. Fortagne,A. Almansa,H. O. Blom +26 more
TL;DR: Generic massively parallel intelligent cantilever-probe platforms is demonstrated and a packaged VLSI NEMS-chip incorporating 128 proximal probes, fully addressable with control and readout interconnects and advanced software will be presented.
Journal ArticleDOI
Scanning proximal probes for parallel imaging and lithography
K. Ivanova,Y. Sarov,Tzv. Ivanov,Andreas Frank,Jens-Peter Zöllner,Ch. Bitterlich,U. Wenzel,B. E. Volland,S. Klett,Ivo W. Rangelow,P. Zawierucha,M. Zielony,Teodor Gotszalk,D. Dontzov,Walter Schott,N. Nikolov,M. Zier,Bernd Schmidt,Wolfgang Engl,Thomas Sulzbach,Ivan Kostic +20 more
TL;DR: In this article, a massively parallel cantilever-probe platform is demonstrated, with 128 self-sensing and self-actuated proximal probes and readout based on piezoresistive sensors and bending control based on bimorph dc/ac actuations.
Journal ArticleDOI
Quantum size aspects of the piezoresistive effect in ultra thin piezoresistors.
TL;DR: The goal of the project is to calculate and determine thePiezoresistive coefficients in p type Si thin (under 50nm) piezoresistors taking into account the quantum size effect and to compare them with the corresponding coefficients for bulk material.